Comment lampoly SNF 2011-08-14 20:55:30: Bad load lock pump
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Aug 15 15:00:35 PDT 2011
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Comment lampoly SNF 2011-08-14 20:55:30: Bad load lock pump
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Comment lampoly SNF 2011-07-07 09:22:02: Dummy wafers
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Replaced the bad pump.
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Comment lampoly SNF 2011-08-14 20:55:30: Bad load lock pump
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Comment lampoly SNF 2011-07-07 09:22:02: Dummy wafers
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