Problem lampoly SNF 2011-08-14 16:54:25: Alarm 40

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 15 15:02:09 PDT 2011


Replaced the bad LL pump.  Did not see any wafers on the system.  Need to open the process chamber to verify that the chamber is empty.




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