Shutdown lampoly SNF 2011-08-15 15:04:47: Verify chamber is empty

eenriquez at eenriquez at
Mon Aug 15 15:04:48 PDT 2011

User reported that he left a wafer in the chamber.  I did not however find any wafers.  Need to open the process chamber to verify that it is empty.

More information about the lampoly-pcs mailing list