Shutdown lampoly SNF 2011-08-15 15:04:47: Verify chamber is empty

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Aug 15 15:04:48 PDT 2011


User reported that he left a wafer in the chamber.  I did not however find any wafers.  Need to open the process chamber to verify that it is empty.




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