Shutdown lampoly SNF 2011-08-15 15:04:47: Verify chamber is empty
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Mon Aug 15 15:04:48 PDT 2011
User reported that he left a wafer in the chamber. I did not however find any wafers. Need to open the process chamber to verify that it is empty.
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