From cachang at snf.stanford.edu Sat Dec 3 14:20:06 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sat, 3 Dec 2011 14:20:06 -0800 Subject: Problem lampoly SNF 2011-12-03 14:20:06: Entrance load lock purge fail Message-ID: This alarm showed when I ran multiple wafers, but the wafers still went through. From raneeyoo at snf.stanford.edu Sat Dec 3 20:15:04 2011 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sat, 3 Dec 2011 20:15:04 -0800 Subject: Problem lampoly SNF 2011-12-03 20:15:03: error: entrance loadlock purge failed Message-ID: when i ran cleaning recipe w/ two wafers, there was error message saying entrance load lock purge failed. but wafers went through. From bchui at snf.stanford.edu Sun Dec 4 17:10:11 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 4 Dec 2011 17:10:11 -0800 Subject: Shutdown lampoly SNF 2011-12-04 17:10:11: ELL purge taking way too long Message-ID: It takes 5-10 min for the ELL to purge to admit each wafer. Unacceptable if one is trying to run anything more than one or two wafers. From cbaxter at snf.stanford.edu Sun Dec 4 19:09:55 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Dec 2011 19:09:55 -0800 Subject: Shutdown lampoly SNF 2011-12-04 17:10:11: ELL purge taking way too long Message-ID: Found N2 purge line had a leak on the 3/8 poly tubing. Cut tubing and installed a 3/8 union swagged lock connector. From cbaxter at snf.stanford.edu Sun Dec 4 19:10:05 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Dec 2011 19:10:05 -0800 Subject: Problem lampoly SNF 2011-12-03 20:15:03: error: entrance loadlock purge failed Message-ID: From cbaxter at snf.stanford.edu Sun Dec 4 19:10:09 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Dec 2011 19:10:09 -0800 Subject: Problem lampoly SNF 2011-12-03 14:20:06: Entrance load lock purge fail Message-ID: From cbaxter at snf.stanford.edu Sun Dec 4 21:24:50 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Dec 2011 21:24:50 -0800 Subject: Shutdown lampoly SNF 2011-12-04 21:24:49: Entrance load vent Message-ID: The entrance load lock intermittentlu won't vent, troubeshooting in progress. From bchui at snf.stanford.edu Mon Dec 5 18:14:22 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Mon, 5 Dec 2011 18:14:22 -0800 Subject: Problem lampoly SNF 2011-12-05 18:14:22: Galil gap drive error Message-ID: After the ELL vented, I tried running my wafers through. But when the first wafer entered the process chamber there was a Galil gap drive error. I took out all my other wafers but the one wafer is still trapped inside the process chamber. From mtang at snf.stanford.edu Tue Dec 6 08:15:37 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 6 Dec 2011 08:15:37 -0800 Subject: Problem lampoly SNF 2011-12-05 18:14:22: Galil gap drive error Message-ID: Flag had gotten loose. The gap limit detect sensor was snapped (again) and needs to be replaced, but it's OK for now. Tightened the flag so the gap error is cleared. From cbaxter at snf.stanford.edu Tue Dec 6 19:46:07 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 6 Dec 2011 19:46:07 -0800 Subject: Problem lampoly SNF 2011-12-06 19:46:07: Bad vent valve Message-ID: The APtech vent valve is bad (stuck close) the vent valve assembly upper body will need to be change, will ask Elmer ot Mike to order the valve assembly.. From eenriquez at snf.stanford.edu Thu Dec 8 11:48:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Dec 2011 11:48:47 -0800 Subject: Shutdown lampoly SNF 2011-12-04 21:24:49: Entrance load vent Message-ID: Replaced defective vent valve assembly with a single pneumatic valve. This is a temporary fix until the valve we've ordered arrives. From eenriquez at snf.stanford.edu Thu Dec 8 11:48:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 8 Dec 2011 11:48:58 -0800 Subject: Problem lampoly SNF 2011-12-06 19:46:07: Bad vent valve Message-ID: Replaced defective vent valve assembly with a single pneumatic valve. This is a temporary fix until the valve we've ordered arrives. From sclaussen at snf.stanford.edu Fri Dec 9 10:12:55 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 9 Dec 2011 10:12:55 -0800 Subject: Problem lampoly SNF 2011-12-09 10:12:54: Alarm 302 Message-ID: Right after enabling and clearing alarms, I got one about the MFC for gas #3 exceeding its value by more than 3%. However, it cleared itself. From sclaussen at snf.stanford.edu Fri Dec 9 11:38:24 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Fri, 9 Dec 2011 11:38:24 -0800 Subject: Shutdown lampoly SNF 2011-12-09 11:38:23: Exit arm stuck in exit cassette Message-ID: A whole string of alarms about the pump and exit cassette... Dummy wafer is still in the chamber. From eenriquez at snf.stanford.edu Fri Dec 9 13:06:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Dec 2011 13:06:42 -0800 Subject: Shutdown lampoly SNF 2011-12-09 11:38:23: Exit arm stuck in exit cassette Message-ID: Wafer sensor on the exit cassette could not "see" the dirty dummy wafer. Blocked the sensor and resumed process. From cbaxter at snf.stanford.edu Fri Dec 9 14:52:37 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 9 Dec 2011 14:52:37 -0800 Subject: Problem lampoly SNF 2011-12-09 10:12:54: Alarm 302 Message-ID: From raneeyoo at snf.stanford.edu Fri Dec 9 17:31:27 2011 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Fri, 9 Dec 2011 17:31:27 -0800 Subject: Problem lampoly SNF 2011-12-09 17:31:27: error 302 , low bias voltages Message-ID: error302 keep showing "gas 3 MFC auto zero error exceeds 3% of full scale. however, wafers went through the process. bias voltages are very low. first dummy wafer run, -4 V for step3(stab), and -3V for step 5(ME) 2nd dummy wafer run, -30 for step3, and -26 for step5. could you please fix this? thanks. From cbaxter at snf.stanford.edu Fri Dec 9 18:26:15 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 9 Dec 2011 18:26:15 -0800 Subject: Problem lampoly SNF 2011-12-09 17:31:27: error 302 , low bias voltages Message-ID: Ran recipe #1 abd bias voltage is -72... From raneeyoo at snf.stanford.edu Fri Dec 9 23:46:30 2011 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Fri, 9 Dec 2011 23:46:30 -0800 Subject: Problem lampoly SNF 2011-12-09 23:46:29: low bias Message-ID: bias is -20 for stab and -20 for ME @ rcp90. From cbaxter at snf.stanford.edu Sat Dec 10 07:43:16 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 10 Dec 2011 07:43:16 -0800 Subject: Problem lampoly SNF 2011-12-09 23:46:29: low bias Message-ID: Using bare silicon dummy wafers, the bias voltage on recipe#90 is on step#3 -45 and on step#5 -40. From bchui at snf.stanford.edu Sat Dec 10 16:44:41 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sat, 10 Dec 2011 16:44:41 -0800 Subject: Shutdown lampoly SNF 2011-12-10 16:44:41: No RF top Message-ID: shows -15W instead of the expected +250W. Same for steps 3 and 5 From cbaxter at snf.stanford.edu Sun Dec 11 07:36:13 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 11 Dec 2011 07:36:13 -0800 Subject: Comment lampoly SNF 2011-12-11 07:36:13: No cooling water... Message-ID: From cbaxter at snf.stanford.edu Sun Dec 11 10:34:47 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 11 Dec 2011 10:34:47 -0800 Subject: Shutdown lampoly SNF 2011-12-10 16:44:41: No RF top Message-ID: Cooling water is back on.. From sclaussen at snf.stanford.edu Sun Dec 11 15:58:16 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 11 Dec 2011 15:58:16 -0800 Subject: Problem lampoly SNF 2011-12-11 15:58:16: Burned resist Message-ID: Using Recipe 1, 9min. Possibly due to residual poor backside cooling? From eenriquez at snf.stanford.edu Mon Dec 12 10:02:04 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Dec 2011 10:02:04 -0800 Subject: Shutdown lampoly SNF 2011-12-12 10:02:04: Scheduled shutdown Message-ID: From cbaxter at snf.stanford.edu Mon Dec 12 16:43:41 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 12 Dec 2011 16:43:41 -0800 Subject: Comment lampoly SNF 2011-12-12 16:43:40: Wet Clean Message-ID: Chamber wet clean completed..