Problem lampoly SNF 2011-12-03 20:15:03: error: entrance loadlock purge failed

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Sat Dec 3 20:15:04 PST 2011


when i ran cleaning recipe w/ two wafers, there was error message saying entrance load lock purge failed.  but wafers went through.




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