Problem lampoly SNF 2011-12-03 20:15:03: error: entrance loadlock purge failed
raneeyoo at snf.stanford.edu
raneeyoo at snf.stanford.edu
Sat Dec 3 20:15:04 PST 2011
when i ran cleaning recipe w/ two wafers, there was error message saying entrance load lock purge failed. but wafers went through.
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