Shutdown lampoly SNF 2011-12-04 17:10:11: ELL purge taking way too long

bchui at snf.stanford.edu bchui at snf.stanford.edu
Sun Dec 4 17:10:11 PST 2011


It takes 5-10 min for the ELL to purge to admit each wafer.  Unacceptable if one is trying to run anything more than one or two wafers.




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