Problem lampoly SNF 2011-12-05 18:14:22: Galil gap drive error

bchui at bchui at
Mon Dec 5 18:14:22 PST 2011

After the ELL vented, I tried running my wafers through.  But when the first wafer entered the process chamber there was a Galil gap drive error.  I took out all my other wafers but the one wafer is still trapped inside the process chamber.

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