Shutdown lampoly SNF 2011-12-09 11:38:23: Exit arm stuck in exit cassette

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Dec 9 13:06:42 PST 2011


Wafer sensor on the exit cassette could not "see" the dirty dummy wafer. Blocked the sensor and resumed process.




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