Problem lampoly SNF 2011-12-09 17:31:27: error 302 , low bias voltages

raneeyoo at snf.stanford.edu raneeyoo at snf.stanford.edu
Fri Dec 9 17:31:27 PST 2011


error302 keep showing "gas 3 MFC auto zero error exceeds 3% of full scale.
however, wafers went through the process.
bias voltages are very low.
first dummy wafer run, -4 V for step3(stab), and -3V for step 5(ME)
2nd dummy wafer run, -30 for step3, and -26 for step5.
could you please fix this?
thanks.




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