From mdickey at snf.stanford.edu Tue Feb 1 06:36:58 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 1 Feb 2011 06:36:58 -0800 Subject: Shutdown lampoly SNF 2011-01-31 16:12:40: HBr shut off Message-ID: HBR back on line From eenriquez at snf.stanford.edu Tue Feb 1 14:40:02 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 1 Feb 2011 14:40:02 -0800 Subject: Comment lampoly SNF 2011-02-01 14:40:01: Replaced HBR cylinder Message-ID: From cbaxter at snf.stanford.edu Tue Feb 1 16:06:15 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 1 Feb 2011 16:06:15 -0800 Subject: Problem lampoly SNF 2011-01-19 14:52:28: HBr usage Message-ID: From cbaxter at snf.stanford.edu Tue Feb 1 16:54:41 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 1 Feb 2011 16:54:41 -0800 Subject: Shutdown lampoly SNF 2011-02-01 16:54:40: HBR turned off Message-ID: From mdickey at snf.stanford.edu Wed Feb 2 07:14:38 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 2 Feb 2011 07:14:38 -0800 Subject: Shutdown lampoly SNF 2011-02-01 16:54:40: HBR turned off Message-ID: HBR back on line From cbaxter at snf.stanford.edu Wed Feb 2 17:14:16 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 2 Feb 2011 17:14:16 -0800 Subject: Shutdown lampoly SNF 2011-02-02 17:14:15: HBr is turned off.. Message-ID: From eenriquez at snf.stanford.edu Thu Feb 3 09:30:47 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 3 Feb 2011 09:30:47 -0800 Subject: Shutdown lampoly SNF 2011-02-02 17:14:15: HBr is turned off.. Message-ID: HBr is now available From emyers at snf.stanford.edu Thu Feb 3 16:27:57 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 3 Feb 2011 16:27:57 -0800 Subject: Shutdown lampoly SNF 2011-02-03 16:27:56: No HBr Message-ID: From emyers at snf.stanford.edu Fri Feb 4 08:09:29 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 4 Feb 2011 08:09:29 -0800 Subject: Shutdown lampoly SNF 2011-02-03 16:27:56: No HBr Message-ID: HBr turned back on From bchui at snf.stanford.edu Fri Feb 4 14:52:49 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 4 Feb 2011 14:52:49 -0800 Subject: Problem lampoly SNF 2011-02-04 14:52:48: Wafer possibly lost inside etch chamber Message-ID: I thought I had put in 6 seasoning dummy wafers but only 5 came out into the receiver cassette. Nevertheless, subsequent wafers ran fine. Please be aware that there may be a dummy wafer lost inside the etch chamber, unless I somehow miscounted the number of entering wafers. From eenriquez at snf.stanford.edu Mon Feb 7 10:53:45 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 7 Feb 2011 10:53:45 -0800 Subject: Problem lampoly SNF 2011-02-04 14:52:48: Wafer possibly lost inside etch chamber Message-ID: Broken wafer in the chamber. Wet cleaned the chamber and ran 5 conditioning wafers. From cursive at snf.stanford.edu Wed Feb 9 15:28:18 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Wed, 9 Feb 2011 15:28:18 -0800 Subject: Problem lampoly SNF 2011-02-09 15:28:17: Internal timer will overflow in 14 hours. Need to restar the machine Message-ID: Error message From eenriquez at snf.stanford.edu Thu Feb 10 13:43:04 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 10 Feb 2011 13:43:04 -0800 Subject: Problem lampoly SNF 2011-02-09 15:28:17: Internal timer will overflow in 14 hours. Need to restar the machine Message-ID: Power cycled the system. From cursive at snf.stanford.edu Thu Feb 10 20:44:15 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 10 Feb 2011 20:44:15 -0800 Subject: Shutdown lampoly SNF 2011-02-10 20:44:15: 2 dummy wafers stuck in the main chamber Message-ID: running dummy wafers on modified recipe #45 (modified recipe #1) one wafer didn't come out with robot wafer holder, and second wafer came in at the same time. There are two dummy wafers stuck inside. From cursive at snf.stanford.edu Thu Feb 10 20:49:50 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Thu, 10 Feb 2011 20:49:50 -0800 Subject: Problem lampoly SNF 2011-02-10 20:49:49: There might be three wafers in main chamber Message-ID: discussed with bchui, he also lost one wafer inside the main chamber. So there might be three wafers inside. His result showed that one quarter of the wafer had slower etch rate. Be careful of the critical process. From cbaxter at snf.stanford.edu Fri Feb 11 09:04:14 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:04:14 -0800 Subject: Shutdown lampoly SNF 2011-02-10 20:44:15: 2 dummy wafers stuck in the main chamber Message-ID: Wafer broken inside the chamber, removed broken wafer chips and wiped down chamber. Cycling dummy wafers.. From cbaxter at snf.stanford.edu Fri Feb 11 09:04:21 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Feb 2011 09:04:21 -0800 Subject: Problem lampoly SNF 2011-02-10 20:49:49: There might be three wafers in main chamber Message-ID: From cursive at snf.stanford.edu Fri Feb 11 11:58:10 2011 From: cursive at snf.stanford.edu (cursive at snf.stanford.edu) Date: Fri, 11 Feb 2011 11:58:10 -0800 Subject: Problem lampoly SNF 2011-02-11 11:58:10: exit door sensor fail Message-ID: exit door sensor fail wafer stuck inside. From cbaxter at snf.stanford.edu Fri Feb 11 12:19:34 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Feb 2011 12:19:34 -0800 Subject: Problem lampoly SNF 2011-02-11 11:58:10: exit door sensor fail Message-ID: Enable exit indexer.. From haemmerl at snf.stanford.edu Tue Feb 15 11:21:55 2011 From: haemmerl at snf.stanford.edu (haemmerl at snf.stanford.edu) Date: Tue, 15 Feb 2011 11:21:55 -0800 Subject: Shutdown lampoly SNF 2011-02-15 11:21:54: Wafer stuck in the etch chamber Message-ID: From eenriquez at snf.stanford.edu Tue Feb 15 14:53:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Feb 2011 14:53:58 -0800 Subject: Shutdown lampoly SNF 2011-02-15 11:21:54: Wafer stuck in the etch chamber Message-ID: Recovered wafer and place it the the user's wafer box. The exit load lock's inner door was stuck open. Pushed on the inner door's solenoid valve and the door started operating normally. Need to replace the solenoid. From eenriquez at snf.stanford.edu Tue Feb 15 15:23:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 15 Feb 2011 15:23:35 -0800 Subject: Shutdown lampoly SNF 2011-02-15 15:23:34: Exit LL door problem Message-ID: Exit loadlock inner door intermittently sticks. Need to replace the pneumatic solenoid. From eenriquez at snf.stanford.edu Fri Feb 18 14:56:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Feb 2011 14:56:01 -0800 Subject: Shutdown lampoly SNF 2011-02-15 15:23:34: Exit LL door problem Message-ID: Increased air pressure to the pneumatic block from 80 to 90 psi. Ran 16 wafers with no door problems. From usha at snf.stanford.edu Wed Feb 23 13:54:15 2011 From: usha at snf.stanford.edu (usha at snf.stanford.edu) Date: Wed, 23 Feb 2011 13:54:15 -0800 Subject: Comment lampoly SNF 2011-02-23 13:54:15: PM & Qual Data Message-ID: Chamber Leak Rate = 0.03mT/min Gas Cal. Data: Cl2/ SP 25/Cal Err = -2.33 HBr/SP 100/Cal Err = -2.52 HeO2/ SP 5/Cal Err = -0.14 SF6/SP 100/ Cal Err = -3.5 He/ Sp 50/ Cal Err = -2.88 C2F6/ Sp 100/ Cal Err = -2.38 O2/ SP 50/ Cal Err = -0.93 N2/ SP 25/ Cal. Err =-1.48 Etch Loss using recipe 1 (10s BT; 60s ME/30s OE Si = 3749A; Unif =1.53% Oxide = 210A; Unif = 3.57% Resist = 762A; Unif = 3.67% Poly Si = 4104A; Unif = 3.22% From bchui at snf.stanford.edu Wed Feb 23 18:55:59 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Wed, 23 Feb 2011 18:55:59 -0800 Subject: Shutdown lampoly SNF 2011-02-23 18:55:58: No Cl2 Message-ID: When I tried to run the first warmup dummy wafer, the machine errored out at Step 4: requested 40sccm Cl2, actual 0.1 sccm. From eenriquez at snf.stanford.edu Thu Feb 24 09:21:32 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 24 Feb 2011 09:21:32 -0800 Subject: Shutdown lampoly SNF 2011-02-23 18:55:58: No Cl2 Message-ID: Pneumatic line to the Cl2 valve came off. Re-connected the line and ran 4 wafers with no problems.