Problem lampoly SNF 2011-02-04 14:52:48: Wafer possibly lost inside etch chamber

bchui at snf.stanford.edu bchui at snf.stanford.edu
Fri Feb 4 14:52:49 PST 2011


I thought I had put in 6 seasoning dummy wafers but only 5 came out into the receiver cassette.  Nevertheless, subsequent wafers ran fine.  Please be aware that there may be a dummy wafer lost inside the etch chamber, unless I somehow miscounted the number of entering wafers.




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