Problem lampoly SNF 2011-02-04 14:52:48: Wafer possibly lost inside etch chamber

bchui at bchui at
Fri Feb 4 14:52:49 PST 2011

I thought I had put in 6 seasoning dummy wafers but only 5 came out into the receiver cassette.  Nevertheless, subsequent wafers ran fine.  Please be aware that there may be a dummy wafer lost inside the etch chamber, unless I somehow miscounted the number of entering wafers.

More information about the lampoly-pcs mailing list