Problem lampoly SNF 2011-02-04 14:52:48: Wafer possibly lost inside etch chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Mon Feb 7 10:53:45 PST 2011


Broken wafer in the chamber.  Wet cleaned the chamber and ran 5 conditioning wafers.




More information about the lampoly-pcs mailing list