Shutdown lampoly SNF 2011-02-10 20:44:15: 2 dummy wafers stuck in the main chamber

cursive at cursive at
Thu Feb 10 20:44:15 PST 2011

running dummy wafers on modified recipe #45 (modified recipe #1)
one wafer didn't come out with robot wafer holder, and second wafer came in at the same time.
There are two dummy wafers stuck inside.

More information about the lampoly-pcs mailing list