Shutdown lampoly SNF 2011-02-10 20:44:15: 2 dummy wafers stuck in the main chamber

cursive at snf.stanford.edu cursive at snf.stanford.edu
Thu Feb 10 20:44:15 PST 2011


running dummy wafers on modified recipe #45 (modified recipe #1)
one wafer didn't come out with robot wafer holder, and second wafer came in at the same time.
There are two dummy wafers stuck inside.




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