Problem lampoly SNF 2011-02-10 20:49:49: There might be three wafers in main chamber

cursive at snf.stanford.edu cursive at snf.stanford.edu
Thu Feb 10 20:49:50 PST 2011


discussed with bchui, he also lost one wafer inside the main chamber.
So there might be three wafers inside.
His result showed that one quarter of the wafer had slower etch rate.
Be careful of the critical process.




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