Shutdown lampoly SNF 2011-02-10 20:44:15: 2 dummy wafers stuck in the main chamber

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Fri Feb 11 09:04:14 PST 2011


Wafer broken inside the chamber,  removed broken wafer chips
and wiped down chamber. Cycling dummy wafers..




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