Shutdown lampoly SNF 2011-02-15 11:21:54: Wafer stuck in the etch chamber

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Tue Feb 15 14:53:58 PST 2011


Recovered wafer and place it the the user's wafer box.  The exit load lock's inner door was stuck open.  Pushed on the inner door's solenoid valve and the door started operating normally.
Need to replace the solenoid.




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