Shutdown lampoly SNF 2011-02-15 15:23:34: Exit LL door problem

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Feb 18 14:56:01 PST 2011


Increased air pressure to the pneumatic block from 80 to 90 psi.  Ran 16 wafers with no door problems.




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