Comment lampoly SNF 2011-02-23 13:54:15: PM & Qual Data

usha at snf.stanford.edu usha at snf.stanford.edu
Wed Feb 23 13:54:15 PST 2011


Chamber Leak Rate = 0.03mT/min
Gas Cal. Data:
Cl2/ SP 25/Cal Err = -2.33
HBr/SP 100/Cal Err = -2.52
HeO2/ SP 5/Cal Err = -0.14
SF6/SP 100/ Cal Err = -3.5
He/ Sp 50/ Cal Err = -2.88
C2F6/ Sp 100/ Cal Err = -2.38
O2/ SP 50/ Cal Err = -0.93
N2/ SP 25/ Cal. Err =-1.48
Etch Loss using recipe 1 (10s BT; 60s ME/30s OE
Si = 3749A; Unif =1.53%
Oxide = 210A; Unif = 3.57%
Resist = 762A; Unif = 3.67%
Poly Si = 4104A; Unif = 3.22%




More information about the lampoly-pcs mailing list