Shutdown lampoly SNF 2011-02-23 18:55:58: No Cl2

bchui at snf.stanford.edu bchui at snf.stanford.edu
Wed Feb 23 18:55:59 PST 2011


When I tried to run the first warmup dummy wafer, the machine errored out at Step 4: requested 40sccm Cl2, actual 0.1 sccm.




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