February 2011 Archives by thread

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Starting: Tue Feb 1 06:36:58 PST 2011
Ending: Thu Feb 24 09:21:32 PST 2011
Messages: 26

• Shutdown lampoly SNF 2011-01-31 16:12:40: HBr shut off   mdickey at snf.stanford.edu
• Comment lampoly SNF 2011-02-01 14:40:01: Replaced HBR cylinder   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2011-01-19 14:52:28: HBr usage   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2011-02-01 16:54:40: HBR turned off   cbaxter at snf.stanford.edu
  • Shutdown lampoly SNF 2011-02-01 16:54:40: HBR turned off   mdickey at snf.stanford.edu
• Shutdown lampoly SNF 2011-02-02 17:14:15: HBr is turned off..   cbaxter at snf.stanford.edu
  • Shutdown lampoly SNF 2011-02-02 17:14:15: HBr is turned off..   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2011-02-03 16:27:56: No HBr   emyers at snf.stanford.edu
  • Shutdown lampoly SNF 2011-02-03 16:27:56: No HBr   emyers at snf.stanford.edu
• Problem lampoly SNF 2011-02-04 14:52:48: Wafer possibly lost inside etch chamber   bchui at snf.stanford.edu
  • Problem lampoly SNF 2011-02-04 14:52:48: Wafer possibly lost inside etch chamber   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2011-02-09 15:28:17: Internal timer will overflow in 14 hours. Need to restar the machine   cursive at snf.stanford.edu
  • Problem lampoly SNF 2011-02-09 15:28:17: Internal timer will overflow in 14 hours. Need to restar the machine   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2011-02-10 20:44:15: 2 dummy wafers stuck in the main chamber   cursive at snf.stanford.edu
  • Shutdown lampoly SNF 2011-02-10 20:44:15: 2 dummy wafers stuck in the main chamber   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2011-02-10 20:49:49: There might be three wafers in main chamber   cursive at snf.stanford.edu
  • Problem lampoly SNF 2011-02-10 20:49:49: There might be three wafers in main chamber   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2011-02-11 11:58:10: exit door sensor fail   cursive at snf.stanford.edu
  • Problem lampoly SNF 2011-02-11 11:58:10: exit door sensor fail   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2011-02-15 11:21:54: Wafer stuck in the etch chamber   haemmerl at snf.stanford.edu
  • Shutdown lampoly SNF 2011-02-15 11:21:54: Wafer stuck in the etch chamber   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2011-02-15 15:23:34: Exit LL door problem   eenriquez at snf.stanford.edu
  • Shutdown lampoly SNF 2011-02-15 15:23:34: Exit LL door problem   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2011-02-23 13:54:15: PM & Qual Data   usha at snf.stanford.edu
• Shutdown lampoly SNF 2011-02-23 18:55:58: No Cl2   bchui at snf.stanford.edu
  • Shutdown lampoly SNF 2011-02-23 18:55:58: No Cl2   eenriquez at snf.stanford.edu

Last message date: Thu Feb 24 09:21:32 PST 2011
Archived on: Sun Dec 23 09:06:16 PST 2012

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