From cbaxter at snf.stanford.edu Wed Jan 5 14:50:24 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Jan 2011 14:50:24 -0800 Subject: Shutdown lampoly SNF 2010-12-13 17:11:13: Gap drive error again Message-ID: Rebuild gap drive and installed new gap drive motor. From cbaxter at snf.stanford.edu Wed Jan 5 15:09:22 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Jan 2011 15:09:22 -0800 Subject: Comment lampoly SNF 2010-11-29 18:09:18: Two wafers stuck in transport Message-ID: From cbaxter at snf.stanford.edu Wed Jan 5 15:09:48 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Jan 2011 15:09:48 -0800 Subject: Comment lampoly SNF 2010-11-23 13:03:39: Machine troubleshooting next week Message-ID: From cbaxter at snf.stanford.edu Wed Jan 5 15:10:00 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 5 Jan 2011 15:10:00 -0800 Subject: Comment lampoly SNF 2010-11-29 16:31:43: no RF Message-ID: From mtang at snf.stanford.edu Fri Jan 14 15:50:10 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 14 Jan 2011 15:50:10 -0800 Subject: Shutdown lampoly SNF 2011-01-14 15:50:09: HBr is off line Message-ID: From mtang at snf.stanford.edu Wed Jan 19 10:26:07 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 19 Jan 2011 10:26:07 -0800 Subject: Shutdown lampoly SNF 2011-01-14 15:50:09: HBr is off line Message-ID: Temporarily back online. From eenriquez at snf.stanford.edu Wed Jan 19 12:52:35 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:52:35 -0800 Subject: Comment lampoly SNF 2010-11-10 11:28:28: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 19 12:52:42 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:52:42 -0800 Subject: Comment lampoly SNF 2010-11-07 19:19:15: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 19 12:52:46 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:52:46 -0800 Subject: Comment lampoly SNF 2010-11-07 07:55:11: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 19 12:52:52 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:52:52 -0800 Subject: Comment lampoly SNF 2010-11-04 16:57:58: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 19 12:53:03 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:53:03 -0800 Subject: Comment lampoly SNF 2010-12-05 09:59:49: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 19 12:53:07 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:53:07 -0800 Subject: Comment lampoly SNF 2010-10-25 13:32:21: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 19 12:53:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:53:12 -0800 Subject: Comment lampoly SNF 2010-10-26 12:46:26: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 19 12:53:21 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:53:21 -0800 Subject: Comment lampoly SNF 2010-11-15 09:16:39: Update Message-ID: Archived From eenriquez at snf.stanford.edu Wed Jan 19 12:53:50 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 19 Jan 2011 12:53:50 -0800 Subject: Comment lampoly SNF 2010-10-26 21:11:08: Update Message-ID: Archived From mtang at snf.stanford.edu Wed Jan 19 14:52:29 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 19 Jan 2011 14:52:29 -0800 Subject: Problem lampoly SNF 2011-01-19 14:52:28: HBr usage Message-ID: Dear Lampoly and P5000Etch users -- Thanks for your patience. There are two problems with the HBr supply. First, we are nearly out. A spare bottle has been on order for many weeks and has even shipped, but we do not have an estimated delivery yet (it can be a surprisingly long time because of regulations governing transport of hazardous chemicals). Second, the HBr toxic gas sensor for the gas cylinder has been having problems. The sensor head has been replaced and is under observation, but we cannot run HBr without monitoring. Until these two problems are resolved, we will allow HBr use only during regular working hours (Monday-Friday, ~8-4) to allow staff to monitor both the remaining HBr supply and the sensor. The HBr bottle will be shut off in the evenings and turned on in the morning. Lampoly will be shutdown in the evenings. A problem message will be posted on p5000etch. We will update Coral as we work to resolve this problems. From mtang at snf.stanford.edu Wed Jan 19 16:52:36 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 19 Jan 2011 16:52:36 -0800 Subject: Shutdown lampoly SNF 2011-01-19 16:52:35: HBr off Message-ID: From mtang at snf.stanford.edu Thu Jan 20 08:06:07 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 20 Jan 2011 08:06:07 -0800 Subject: Shutdown lampoly SNF 2011-01-19 16:52:35: HBr off Message-ID: HBr back on for the day. From mtang at snf.stanford.edu Thu Jan 20 16:05:17 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 20 Jan 2011 16:05:17 -0800 Subject: Shutdown lampoly SNF 2011-01-20 16:05:16: HBr turned off Message-ID: From mtang at snf.stanford.edu Fri Jan 21 08:00:55 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 21 Jan 2011 08:00:55 -0800 Subject: Shutdown lampoly SNF 2011-01-20 16:05:16: HBr turned off Message-ID: HBr back on! From mtang at snf.stanford.edu Fri Jan 21 16:34:51 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 21 Jan 2011 16:34:51 -0800 Subject: Shutdown lampoly SNF 2011-01-21 16:34:51: HBr turned off Message-ID: From mdickey at snf.stanford.edu Mon Jan 24 08:36:42 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 24 Jan 2011 08:36:42 -0800 Subject: Shutdown lampoly SNF 2011-01-21 16:34:51: HBr turned off Message-ID: HBR BACK ON From mtang at snf.stanford.edu Mon Jan 24 13:16:39 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:16:39 -0800 Subject: Problem lampoly SNF 2010-10-28 13:55:33: RF hard tolerance exceeded Message-ID: See Jim McVittie's comment on 12/10/10. From mtang at snf.stanford.edu Mon Jan 24 13:19:23 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:19:23 -0800 Subject: Problem lampoly SNF 2010-10-28 17:00:49: RF unstable Message-ID: See Jim McVittie's comments on 12/10/10. Also, it appears that HBr-only recipes are inherently unstable in the first 10-20 seconds after the plasma strikes. Jim suggests that this is why industry does not run HBr-only recipes despite greater selectivity. This can be stabilized by running a brief (10-20) seconds of the standard Cl2/HBr main etch recipe followed by HBr-only. So, you may want to modify your HBr-only recipes accordingly. From mtang at snf.stanford.edu Mon Jan 24 13:19:57 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:19:57 -0800 Subject: Comment lampoly SNF 2010-10-29 16:49:43: Update Message-ID: See Jim McVittie's comment on 12/10/10. From mtang at snf.stanford.edu Mon Jan 24 13:22:10 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:22:10 -0800 Subject: Problem lampoly SNF 2010-11-10 15:37:34: OK for non SF6 recipes Message-ID: See Jim's comment of 12/10/10. From mtang at snf.stanford.edu Mon Jan 24 13:22:23 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:22:23 -0800 Subject: Problem lampoly SNF 2010-11-12 16:16:31: Watch reflected power Message-ID: See Jim's comment of 12/10/10. From mtang at snf.stanford.edu Mon Jan 24 13:22:30 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:22:30 -0800 Subject: Comment lampoly SNF 2010-11-15 19:35:28: Si dummies fine; poly wafers marginal Message-ID: See Jim's comment of 12/10/10. From mtang at snf.stanford.edu Mon Jan 24 13:22:43 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:22:43 -0800 Subject: Comment lampoly SNF 2010-11-17 15:54:10: RF Troubleshooting Message-ID: See Jim's comment of 12/10/10. From mtang at snf.stanford.edu Mon Jan 24 13:22:49 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:22:49 -0800 Subject: Problem lampoly SNF 2010-11-19 18:18:07: Plasma still flickering Message-ID: See Jim's comment of 12/10/10. From mtang at snf.stanford.edu Mon Jan 24 13:22:57 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:22:57 -0800 Subject: Comment lampoly SNF 2010-11-26 17:43:32: higher bottom RF works Message-ID: See Jim's comment of 12/10/10. From mtang at snf.stanford.edu Mon Jan 24 13:23:16 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 13:23:16 -0800 Subject: Problem lampoly SNF 2010-12-10 16:41:55: Conditionally up Message-ID: See Jim's comment of 12/10/10. From mtang at snf.stanford.edu Mon Jan 24 16:57:08 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 24 Jan 2011 16:57:08 -0800 Subject: Shutdown lampoly SNF 2011-01-24 16:57:08: HBr off Message-ID: From eenriquez at snf.stanford.edu Tue Jan 25 08:16:50 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 25 Jan 2011 08:16:50 -0800 Subject: Shutdown lampoly SNF 2011-01-24 16:57:08: HBr off Message-ID: HBr is back on From cbaxter at snf.stanford.edu Tue Jan 25 16:33:54 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 25 Jan 2011 16:33:54 -0800 Subject: Shutdown lampoly SNF 2011-01-25 16:33:54: Hbr Message-ID: The Hbr cylinder is close.. From eenriquez at snf.stanford.edu Wed Jan 26 11:09:24 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 26 Jan 2011 11:09:24 -0800 Subject: Shutdown lampoly SNF 2011-01-25 16:33:54: Hbr Message-ID: HBr cylinder is back ON From mtang at snf.stanford.edu Wed Jan 26 16:21:55 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 26 Jan 2011 16:21:55 -0800 Subject: Shutdown lampoly SNF 2011-01-26 16:21:54: HBr off Message-ID: From mdickey at snf.stanford.edu Thu Jan 27 07:57:17 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 27 Jan 2011 07:57:17 -0800 Subject: Shutdown lampoly SNF 2011-01-26 16:21:54: HBr off Message-ID: HBR on From emyers at snf.stanford.edu Thu Jan 27 15:58:53 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Thu, 27 Jan 2011 15:58:53 -0800 Subject: Shutdown lampoly SNF 2011-01-27 15:58:53: No HBr Message-ID: Turning off the HBr for the night. From mdickey at snf.stanford.edu Fri Jan 28 07:47:15 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 28 Jan 2011 07:47:15 -0800 Subject: Shutdown lampoly SNF 2011-01-27 15:58:53: No HBr Message-ID: HBR back on line From emyers at snf.stanford.edu Fri Jan 28 16:05:39 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Fri, 28 Jan 2011 16:05:39 -0800 Subject: Shutdown lampoly SNF 2011-01-28 16:05:38: No HBr Message-ID: Shutdown for the weekend. From cbaxter at snf.stanford.edu Sat Jan 29 18:00:48 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 29 Jan 2011 18:00:48 -0800 Subject: Comment lampoly SNF 2011-01-29 18:00:48: Message-ID: From cbaxter at snf.stanford.edu Sat Jan 29 18:01:05 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 29 Jan 2011 18:01:05 -0800 Subject: Comment lampoly SNF 2011-01-29 18:01:05: test Message-ID: test From mdickey at snf.stanford.edu Mon Jan 31 06:03:52 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 31 Jan 2011 06:03:52 -0800 Subject: Shutdown lampoly SNF 2011-01-28 16:05:38: No HBr Message-ID: HBR back on line From eenriquez at snf.stanford.edu Mon Jan 31 14:49:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Jan 2011 14:49:58 -0800 Subject: Comment lampoly SNF 2011-01-29 18:01:05: test Message-ID: Archived From eenriquez at snf.stanford.edu Mon Jan 31 14:50:13 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 31 Jan 2011 14:50:13 -0800 Subject: Comment lampoly SNF 2011-01-29 18:00:48: Message-ID: From mtang at snf.stanford.edu Mon Jan 31 16:12:41 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Mon, 31 Jan 2011 16:12:41 -0800 Subject: Shutdown lampoly SNF 2011-01-31 16:12:40: HBr shut off Message-ID: