From dongrip at snf.stanford.edu Wed Jul 6 22:45:13 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 6 Jul 2011 22:45:13 -0700 Subject: Problem lampoly SNF 2011-07-06 22:45:12: Shuttle vacuum sense fail Message-ID: 18 shuttle vacuum sense fail, sensor FALSE, should be TRUE...Alarm message popped up during the warm-up. I don't know how to handle this issue. Lampoly dummy wafers are still inside. From dongrip at snf.stanford.edu Wed Jul 6 22:45:56 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Wed, 6 Jul 2011 22:45:56 -0700 Subject: Shutdown lampoly SNF 2011-07-06 22:45:55: 18 Shuttle vacuum sense fail problem Message-ID: From cbaxter at snf.stanford.edu Thu Jul 7 08:58:08 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Jul 2011 08:58:08 -0700 Subject: Shutdown lampoly SNF 2011-07-06 22:45:55: 18 Shuttle vacuum sense fail problem Message-ID: The dummy wafer was no good, it has residue(sticky) on the backside of the wafer causing the shuttle arm sensor not to sense a wafer on the shuttle arm. From cbaxter at snf.stanford.edu Thu Jul 7 08:58:15 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Jul 2011 08:58:15 -0700 Subject: Problem lampoly SNF 2011-07-06 22:45:12: Shuttle vacuum sense fail Message-ID: From cbaxter at snf.stanford.edu Thu Jul 7 09:22:03 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 7 Jul 2011 09:22:03 -0700 Subject: Comment lampoly SNF 2011-07-07 09:22:02: Dummy wafers Message-ID: We removed all the used dummy wafers and changed them with new bare silicon dummy wafers. From mtang at snf.stanford.edu Thu Jul 7 14:11:27 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 7 Jul 2011 14:11:27 -0700 Subject: Problem lampoly SNF 2011-04-29 14:53:15: Grass report Message-ID: Ben reports that this process works following chamber clean (confirmed in early May, though don't know for sure if the improvement and clearn are ncessarily correlated). From mtang at snf.stanford.edu Thu Jul 7 14:13:29 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 7 Jul 2011 14:13:29 -0700 Subject: Problem lampoly SNF 2011-05-06 11:36:57: Watch your wafers Message-ID: Wafer handling issues (other than the sticky wafer just rescued) have not reappeared. From dongrip at snf.stanford.edu Fri Jul 15 22:56:11 2011 From: dongrip at snf.stanford.edu (dongrip at snf.stanford.edu) Date: Fri, 15 Jul 2011 22:56:11 -0700 Subject: Shutdown lampoly SNF 2011-07-15 22:56:10: Load Point Chuck Vacuum Sensor Fail Alarm Message-ID: Still process wafer inside... From mdickey at snf.stanford.edu Mon Jul 18 08:24:30 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 18 Jul 2011 08:24:30 -0700 Subject: Shutdown lampoly SNF 2011-07-15 22:56:10: Load Point Chuck Vacuum Sensor Fail Alarm Message-ID: Recovered wafer From popomoo at snf.stanford.edu Sat Jul 30 07:32:14 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Sat, 30 Jul 2011 07:32:14 -0700 Subject: Problem lampoly SNF 2011-07-30 07:32:14: water chiller has failed Message-ID: Error message on the screen.