Problem lampoly SNF 2011-07-06 22:45:12: Shuttle vacuum sense fail

dongrip at dongrip at
Wed Jul 6 22:45:13 PDT 2011

18 shuttle vacuum sense fail, sensor FALSE, should be TRUE...Alarm message popped up during the warm-up. I don't know how to handle this issue. Lampoly dummy wafers are still inside. 

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