Shutdown lampoly SNF 2011-07-06 22:45:55: 18 Shuttle vacuum sense fail problem

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Thu Jul 7 08:58:08 PDT 2011


The dummy wafer was no good, it has residue(sticky) on the
backside of the wafer causing the shuttle arm sensor not
to sense a wafer on the shuttle arm.




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