From bchui at snf.stanford.edu Thu Jun 2 17:40:47 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 2 Jun 2011 17:40:47 -0700 Subject: Shutdown lampoly SNF 2011-06-02 17:40:47: Wafer stuck in etch chamber Message-ID: Load point vacuum loss error From eenriquez at snf.stanford.edu Fri Jun 3 12:28:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 3 Jun 2011 12:28:41 -0700 Subject: Comment lampoly SNF 2011-06-03 12:28:40: Update Message-ID: Shuttle has no power. Need to troubleshoot. From eenriquez at snf.stanford.edu Mon Jun 6 14:57:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 6 Jun 2011 14:57:22 -0700 Subject: Comment lampoly SNF 2011-06-06 14:57:21: Update Message-ID: Found a broken shuttle drive pulley. The part has been ordered and should be here on Wednesday From eenriquez at snf.stanford.edu Tue Jun 7 14:52:06 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Jun 2011 14:52:06 -0700 Subject: Shutdown lampoly SNF 2011-06-02 17:40:47: Wafer stuck in etch chamber Message-ID: Replaced broken shuttle arm drive pulley. Recovered stuck wafer. From eenriquez at snf.stanford.edu Tue Jun 7 14:52:15 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Jun 2011 14:52:15 -0700 Subject: Comment lampoly SNF 2011-06-03 12:28:40: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Jun 7 14:52:22 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 7 Jun 2011 14:52:22 -0700 Subject: Comment lampoly SNF 2011-06-06 14:57:21: Update Message-ID: Archived From barlian at snf.stanford.edu Wed Jun 8 16:24:28 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Wed, 8 Jun 2011 16:24:28 -0700 Subject: Shutdown lampoly SNF 2011-06-08 16:24:28: problems Message-ID: 1) 68 Galil gap drive excessive position error. Gap drive reset. 2) 79 Chamber electrode gap spacing is not high enough to transfer wafer There are two dummy wafers held in the machine now (one in the process chamber, the other one in the positioning chamber) From cbaxter at snf.stanford.edu Thu Jun 9 08:26:43 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 9 Jun 2011 08:26:43 -0700 Subject: Shutdown lampoly SNF 2011-06-08 16:24:28: problems Message-ID: The flag for the gap sensor came loose and jammed on the upper limit gap sensor and broke it half, temporary epoxy the sensor together and will order a replacement sensor. From chingmei at snf.stanford.edu Thu Jun 30 13:52:24 2011 From: chingmei at snf.stanford.edu (chingmei at snf.stanford.edu) Date: Thu, 30 Jun 2011 13:52:24 -0700 Subject: Problem lampoly SNF 2011-06-30 13:52:24: 184 water chiller has failed Message-ID: From mdickey at snf.stanford.edu Thu Jun 30 14:10:00 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 30 Jun 2011 14:10:00 -0700 Subject: Problem lampoly SNF 2011-06-30 13:52:24: 184 water chiller has failed Message-ID: topped off chiller