Shutdown lampoly SNF 2011-06-02 17:40:47: Wafer stuck in etch chamber
bchui at snf.stanford.edu
bchui at snf.stanford.edu
Thu Jun 2 17:40:47 PDT 2011
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Shutdown lampoly SNF 2011-06-02 17:40:47: Wafer stuck in etch chamber
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Load point vacuum loss error
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Shutdown lampoly SNF 2011-06-02 17:40:47: Wafer stuck in etch chamber
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