Comment lampoly SNF 2011-06-03 12:28:40: Update
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Jun 3 12:28:41 PDT 2011
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Shutdown lampoly SNF 2011-06-02 17:40:47: Wafer stuck in etch chamber
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Comment lampoly SNF 2011-06-03 12:28:40: Update
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Shuttle has no power. Need to troubleshoot.
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Shutdown lampoly SNF 2011-06-02 17:40:47: Wafer stuck in etch chamber
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Comment lampoly SNF 2011-06-03 12:28:40: Update
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