Shutdown lampoly SNF 2011-06-08 16:24:28: problems

barlian at snf.stanford.edu barlian at snf.stanford.edu
Wed Jun 8 16:24:28 PDT 2011


1) 68 Galil gap drive excessive position error. Gap drive reset.
2) 79 Chamber electrode gap spacing is not high enough to transfer wafer
There are two dummy wafers held in the machine now (one in the process chamber, the other one in the positioning chamber)




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