From eenriquez at snf.stanford.edu Wed Mar 2 15:15:27 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 2 Mar 2011 15:15:27 -0800 Subject: Problem lampoly SNF 2010-09-27 17:13:36: Low bias Message-ID: The bottom RF generator was replaced. From wslee at snf.stanford.edu Wed Mar 16 11:34:49 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Wed, 16 Mar 2011 11:34:49 -0700 Subject: Shutdown lampoly SNF 2011-03-16 11:34:48: Wafer stuck Message-ID: Exit inner load lock door sensor error... I cycled through many wafers (~10) without any problem and then it got stuck and I couldn't clear the error. From eenriquez at snf.stanford.edu Wed Mar 16 15:51:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 16 Mar 2011 15:51:51 -0700 Subject: Shutdown lampoly SNF 2011-03-16 11:34:48: Wafer stuck Message-ID: Recovered the wafer. Cycled 4 wafers with no problems. From cbaxter at snf.stanford.edu Fri Mar 18 14:48:23 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 18 Mar 2011 14:48:23 -0700 Subject: Shutdown lampoly SNF 2011-03-18 14:48:22: Exit load lock door Message-ID: Changing inner exit load lock solenoid.. From cbaxter at snf.stanford.edu Fri Mar 18 15:55:33 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 18 Mar 2011 15:55:33 -0700 Subject: Shutdown lampoly SNF 2011-03-18 14:48:22: Exit load lock door Message-ID: Changed inner exit door solenoid.. From eenriquez at snf.stanford.edu Mon Mar 21 10:34:41 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 21 Mar 2011 10:34:41 -0700 Subject: Comment lampoly SNF 2011-03-21 10:34:40: Pumped out O2 line Message-ID: O2 line was contaminated with N2 (pink plasma). Pumped out the gas line. From emyers at snf.stanford.edu Sun Mar 27 09:06:14 2011 From: emyers at snf.stanford.edu (emyers at snf.stanford.edu) Date: Sun, 27 Mar 2011 09:06:14 -0700 Subject: Problem lampoly SNF 2011-03-27 09:06:11: No Chlorine Message-ID: Chlorine shutdown while investigating high sensor reading a the gas cabinet. From eenriquez at snf.stanford.edu Mon Mar 28 14:16:54 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 28 Mar 2011 14:16:54 -0700 Subject: Comment lampoly SNF 2011-03-28 14:16:53: Chlorine update Message-ID: Replaced a leaky valve in the gas panel. Gas panel passed Helium leak check. Now performing a 24 hour pressure retention test. If test is good, we will perform another helium leak check before we repressurize the line. Chlorine should be available by 3 PM tomorrow. From eenriquez at snf.stanford.edu Tue Mar 29 14:51:01 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Mar 2011 14:51:01 -0700 Subject: Problem lampoly SNF 2011-03-27 09:06:11: No Chlorine Message-ID: Chlorine is now available. From eenriquez at snf.stanford.edu Tue Mar 29 14:51:12 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Mar 2011 14:51:12 -0700 Subject: Comment lampoly SNF 2011-03-28 14:16:53: Chlorine update Message-ID: Archived