Shutdown lampoly SNF 2011-03-16 11:34:48: Wafer stuck
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Wed Mar 16 15:51:51 PDT 2011
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Shutdown lampoly SNF 2011-03-16 11:34:48: Wafer stuck
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Shutdown lampoly SNF 2011-03-18 14:48:22: Exit load lock door
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Recovered the wafer. Cycled 4 wafers with no problems.
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Shutdown lampoly SNF 2011-03-16 11:34:48: Wafer stuck
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Shutdown lampoly SNF 2011-03-18 14:48:22: Exit load lock door
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