Shutdown lampoly SNF 2011-03-18 14:48:22: Exit load lock door
cbaxter at snf.stanford.edu
cbaxter at snf.stanford.edu
Fri Mar 18 14:48:23 PDT 2011
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Shutdown lampoly SNF 2011-03-16 11:34:48: Wafer stuck
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Shutdown lampoly SNF 2011-03-18 14:48:22: Exit load lock door
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Changing inner exit load lock solenoid..
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Shutdown lampoly SNF 2011-03-16 11:34:48: Wafer stuck
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Shutdown lampoly SNF 2011-03-18 14:48:22: Exit load lock door
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