From cbaxter at snf.stanford.edu Sun May 1 18:59:36 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 1 May 2011 18:59:36 -0700 Subject: Problem lampoly SNF 2011-04-30 20:55:51: Gap drive electrode not large enough to transfer wafer Message-ID: Repaired broken wire on limit gap sensor.. From sclaussen at snf.stanford.edu Mon May 2 22:20:52 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Mon, 2 May 2011 22:20:52 -0700 Subject: Shutdown lampoly SNF 2011-05-02 22:20:51: Chamber electrode gap spacing problem Message-ID: Before my first dummy wafer was loaded, I got Alarm 69: Gap drive brake not energized. I cleared it a few times, and once the wafer got to the first loadlock, I was getting both Alarm 69 and Alarm 79: "Chamber electrode gap spacing is not high enough to transfer wafer." From eenriquez at snf.stanford.edu Tue May 3 15:10:56 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 May 2011 15:10:56 -0700 Subject: Comment lampoly SNF 2011-05-03 15:10:56: Update Message-ID: No power to the gap drive. Still troubleshooting. From mtang at snf.stanford.edu Fri May 6 11:35:49 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 6 May 2011 11:35:49 -0700 Subject: Comment lampoly SNF 2011-05-06 11:35:48: Gap drive problem Message-ID: Cesar located the problem to a bad board. He has been trying to locate a spare and may have found one. If it is the correct one, he plans to be in later this afternoon to install and test. From mtang at snf.stanford.edu Fri May 6 11:36:58 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 6 May 2011 11:36:58 -0700 Subject: Problem lampoly SNF 2011-05-06 11:36:57: Watch your wafers Message-ID: By the way, if Cesar is able to fix the gap problem, the will not address the intermittent wafer handling problem we seem to have. Please make sure to count the number of wafers that go in (even dummies) and compare with the number that come out. Thanks From cbaxter at snf.stanford.edu Sat May 7 06:54:20 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sat, 7 May 2011 06:54:20 -0700 Subject: Comment lampoly SNF 2011-05-07 06:54:19: Gap Problem Message-ID: The Gap break is not enerzing, still troubleshooting.. From cbaxter at snf.stanford.edu Tue May 10 13:24:55 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 May 2011 13:24:55 -0700 Subject: Shutdown lampoly SNF 2011-05-02 22:20:51: Chamber electrode gap spacing problem Message-ID: Found broken wire for gap break input power (24vdc), repaired broken wire and cycled wafers w/out problem.. From eenriquez at snf.stanford.edu Tue May 10 13:39:44 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 10 May 2011 13:39:44 -0700 Subject: Comment lampoly SNF 2011-05-07 06:54:19: Gap Problem Message-ID: Archived From mtang at snf.stanford.edu Wed May 11 06:15:39 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 11 May 2011 06:15:39 -0700 Subject: Shutdown lampoly SNF 2011-05-11 06:15:39: Cl2/HBr Unavailable Message-ID: Maintenance work being done on the corrosives vault duct; Cl2 and HBr are unavailable, due back on late this afternoon. From mtang at snf.stanford.edu Wed May 11 14:48:14 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Wed, 11 May 2011 14:48:14 -0700 Subject: Shutdown lampoly SNF 2011-05-11 06:15:39: Cl2/HBr Unavailable Message-ID: Cl2 and HBr are back on! From cbaxter at snf.stanford.edu Sun May 22 04:26:51 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 May 2011 04:26:51 -0700 Subject: Comment lampoly SNF 2011-05-06 11:35:48: Gap drive problem Message-ID: From cbaxter at snf.stanford.edu Sun May 22 04:35:59 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 22 May 2011 04:35:59 -0700 Subject: Comment lampoly SNF 2011-05-03 15:10:56: Update Message-ID: From barlian at snf.stanford.edu Tue May 24 15:45:17 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Tue, 24 May 2011 15:45:17 -0700 Subject: Shutdown lampoly SNF 2011-05-24 15:45:17: water chiller problem Message-ID: From mtang at snf.stanford.edu Tue May 24 16:11:53 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 24 May 2011 16:11:53 -0700 Subject: Shutdown lampoly SNF 2011-05-24 15:45:17: water chiller problem Message-ID: It was low on coolant. Topped off so should be OK now.