From sclaussen at snf.stanford.edu Tue Nov 8 10:45:33 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 8 Nov 2011 10:45:33 -0800 Subject: Problem lampoly SNF 2011-11-08 10:45:33: "Water chiller fail" Message-ID: Arrived at etcher and it is giving the error "water chiller fail." From mdickey at snf.stanford.edu Tue Nov 8 11:01:47 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 8 Nov 2011 11:01:47 -0800 Subject: Problem lampoly SNF 2011-11-08 10:45:33: "Water chiller fail" Message-ID: Topped off chiller From sclaussen at snf.stanford.edu Tue Nov 8 19:41:50 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Tue, 8 Nov 2011 19:41:50 -0800 Subject: Shutdown lampoly SNF 2011-11-08 19:41:49: Turbo pump failure Message-ID: Was running Recipe 99. Seems to be in step 4 that it failed. From eenriquez at snf.stanford.edu Wed Nov 9 09:30:49 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 9 Nov 2011 09:30:49 -0800 Subject: Shutdown lampoly SNF 2011-11-08 19:41:49: Turbo pump failure Message-ID: Restarted turbo and ran the chamber clean recipe. From bchui at snf.stanford.edu Thu Nov 10 18:46:16 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 10 Nov 2011 18:46:16 -0800 Subject: Shutdown lampoly SNF 2011-11-10 18:46:16: Entrance load lock doesn't vent to ATM Message-ID: only dummies stranded in machine From eenriquez at snf.stanford.edu Fri Nov 11 08:53:16 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 11 Nov 2011 08:53:16 -0800 Subject: Shutdown lampoly SNF 2011-11-10 18:46:16: Entrance load lock doesn't vent to ATM Message-ID: Another user recovered the wafers. Cycled 3 wafers with no problems. From bchui at snf.stanford.edu Fri Nov 11 11:29:10 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 11 Nov 2011 11:29:10 -0800 Subject: Problem lampoly SNF 2011-11-11 11:29:09: Still giving ELL purge timeout errors Message-ID: but ultimately recovers and continues cycling. From cbaxter at snf.stanford.edu Fri Nov 11 20:41:14 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 11 Nov 2011 20:41:14 -0800 Subject: Problem lampoly SNF 2011-11-11 11:29:09: Still giving ELL purge timeout errors Message-ID: Adjusted entrnace load purge to 15psi... From bchui at snf.stanford.edu Thu Nov 17 15:55:18 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Thu, 17 Nov 2011 15:55:18 -0800 Subject: Shutdown lampoly SNF 2011-11-17 15:55:17: Main etch doesn't work Message-ID: I started to run several dummies to warm up the machine. At the fourth dummy, main etch (step 5) failed after ~70 secs. Retry, failed at 30sec, then 20, 10 sec.... Noticed that RFtop kept fluctuating between 245 and 265W and wouldn't stablize. Also, actual Cl2 flow is around 35 although setpoint is 40. From mtang at snf.stanford.edu Thu Nov 17 16:52:23 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Thu, 17 Nov 2011 16:52:23 -0800 Subject: Problem lampoly SNF 2011-11-17 16:52:23: No chlorine Message-ID: It looks like the chlorine regulator may have failed, so there is no chlorine to the lab. Will have more of an update tomorrow. From eenriquez at snf.stanford.edu Fri Nov 18 11:13:53 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Nov 2011 11:13:53 -0800 Subject: Problem lampoly SNF 2011-11-17 16:52:23: No chlorine Message-ID: Installed new chlorine cylinder. Cycled 2 wafers with no problems. From eenriquez at snf.stanford.edu Fri Nov 18 11:13:57 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 18 Nov 2011 11:13:57 -0800 Subject: Shutdown lampoly SNF 2011-11-17 15:55:17: Main etch doesn't work Message-ID: Installed new chlorine cylinder. Cycled 2 wafers with no problems. From bchui at snf.stanford.edu Fri Nov 18 15:03:18 2011 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Fri, 18 Nov 2011 15:03:18 -0800 Subject: Problem lampoly SNF 2011-11-18 15:03:17: Error msg: Water Chiller is not working Message-ID: Error occurred towards the tail end of my etching; wafers seem to have etched fine From mtang at snf.stanford.edu Fri Nov 18 16:59:14 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Fri, 18 Nov 2011 16:59:14 -0800 Subject: Shutdown lampoly SNF 2011-11-18 16:59:14: Chiller Message-ID: It looks like it's leaked a lot and the temperature is not controlling. I'm shutting it down. From shott at snf.stanford.edu Sat Nov 19 09:51:36 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 Nov 2011 09:51:36 -0800 Subject: Problem lampoly SNF 2011-11-18 15:03:17: Error msg: Water Chiller is not working Message-ID: Lampoly community: Found that the supply line from the chiller had popped out of the cheesy white Fast-n-Tite fitting on the back of the chiller ... as a result, restarting the pump dumps everything on the floor. Replaced and retightened the line, filled the reservoir so that the level indicators extinguished and restarted the system. Note: there may still be a slow leak in the system .... if there is, during the shutdown we should send this chiller to Chiller Uptime for a rebuild and put our freshly-rebuilt chiller in service. Have I mentioned that I hate Fast-n-Tite fittings .... they should be named Fast-n-not-so-Tite and should be eliminated whenever possible. John From shott at snf.stanford.edu Sat Nov 19 09:51:46 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sat, 19 Nov 2011 09:51:46 -0800 Subject: Shutdown lampoly SNF 2011-11-18 16:59:14: Chiller Message-ID: Lampoly community: Found that the supply line from the chiller had popped out of the cheesy white Fast-n-Tite fitting on the back of the chiller ... as a result, restarting the pump dumps everything on the floor. Replaced and retightened the line, filled the reservoir so that the level indicators extinguished and restarted the system. Note: there may still be a slow leak in the system .... if there is, during the shutdown we should send this chiller to Chiller Uptime for a rebuild and put our freshly-rebuilt chiller in service. Have I mentioned that I hate Fast-n-Tite fittings .... they should be named Fast-n-not-so-Tite and should be eliminated whenever possible. John From cachang at snf.stanford.edu Sat Nov 26 21:06:38 2011 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Sat, 26 Nov 2011 21:06:38 -0800 Subject: Problem lampoly SNF 2011-11-26 21:06:37: Error message: water chiller fail Message-ID: From shott at snf.stanford.edu Sun Nov 27 09:22:07 2011 From: shott at snf.stanford.edu (shott at snf.stanford.edu) Date: Sun, 27 Nov 2011 09:22:07 -0800 Subject: Problem lampoly SNF 2011-11-26 21:06:37: Error message: water chiller fail Message-ID: I added about 1 1/2 quarts of 50/50 water/glycol and reset the chiller. That should make it happy for a while although we are due for a replacement and should send this unit out for a replacement. Thanks, John From wonukjo at snf.stanford.edu Mon Nov 28 13:40:58 2011 From: wonukjo at snf.stanford.edu (wonukjo at snf.stanford.edu) Date: Mon, 28 Nov 2011 13:40:58 -0800 Subject: Comment lampoly SNF 2011-11-28 13:40:57: Message-ID: From eenriquez at snf.stanford.edu Tue Nov 29 07:49:58 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 29 Nov 2011 07:49:58 -0800 Subject: Comment lampoly SNF 2011-11-28 13:40:57: Message-ID: