Shutdown lampoly SNF 2011-11-17 15:55:17: Main etch doesn't work

bchui at snf.stanford.edu bchui at snf.stanford.edu
Thu Nov 17 15:55:18 PST 2011


I started to run several dummies to warm up the machine.  At the fourth dummy, main etch (step 5) failed after ~70 secs.  Retry, failed at 30sec, then 20, 10 sec....  Noticed that RFtop kept fluctuating between 245 and 265W and wouldn't stablize.  Also, actual Cl2 flow is around 35 although setpoint is 40.




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