Shutdown lampoly SNF 2011-11-17 15:55:17: Main etch doesn't work

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Nov 18 11:13:57 PST 2011

Previous message: Shutdown lampoly SNF 2011-11-17 15:55:17: Main etch doesn't work
Next message: Problem lampoly SNF 2011-11-17 16:52:23: No chlorine
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

Installed new chlorine cylinder.  Cycled 2 wafers with no problems.

Previous message: Shutdown lampoly SNF 2011-11-17 15:55:17: Main etch doesn't work
Next message: Problem lampoly SNF 2011-11-17 16:52:23: No chlorine
Messages sorted by: [ date ] [ thread ] [ subject ] [ author ]

More information about the lampoly-pcs mailing list