From wslee at snf.stanford.edu Sat Sep 3 23:16:38 2011 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sat, 3 Sep 2011 23:16:38 -0700 Subject: Problem lampoly SNF 2011-09-03 23:16:37: alarm 184 - the water chiller has failed Message-ID: The alarm 'the water chiller has failed' is up and cannot be cleared. I ran a dummy wafer through and the temperature in the chamber seemed pretty close to the setpoint (within 2 degrees). I am not sure if this is a more serious problem and the tool should be shutdown. From mtang at stanford.edu Sun Sep 4 07:22:57 2011 From: mtang at stanford.edu (Mary Tang) Date: Sun, 04 Sep 2011 07:22:57 -0700 Subject: Problem lampoly SNF 2011-09-03 23:16:37: alarm 184 - the water chiller has failed In-Reply-To: <20110904061638.9005B456D5D@smtp-unencrypted.stanford.edu> References: <20110904061638.9005B456D5D@smtp-unencrypted.stanford.edu> Message-ID: <4E6389C1.8030504@stanford.edu> Hi Scott -- Thanks for reporting. It should be Ok to run, at least for shorter etches (no more than a couple of minutes) which is why it is a yellow alarm rather than red (I'm presuming). And the alarms will continue to annoy as they are supposed to. I suspect the problem is the "chiller" is a little low on water (it has a chronic, variable leak) and is warning us. The chiller actually heats just the electrode/chuck to 60C (the rest of the chamber is resistively heated.) It's worth keeping an eye on chuck temperature on the Status pages because if it goes high, the etch profiles will be terrible. Mary On 9/3/2011 11:16 PM, wslee at snf.stanford.edu wrote: > The alarm 'the water chiller has failed' is up and cannot be cleared. I ran a dummy wafer through and the temperature in the chamber seemed pretty close to the setpoint (within 2 degrees). I am not sure if this is a more serious problem and the tool should be shutdown. > From cbaxter at snf.stanford.edu Sun Sep 4 20:42:38 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 4 Sep 2011 20:42:38 -0700 Subject: Problem lampoly SNF 2011-09-03 23:16:37: alarm 184 - the water chiller has failed Message-ID: Refilled chiller. From popomoo at snf.stanford.edu Fri Sep 16 10:20:55 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Fri, 16 Sep 2011 10:20:55 -0700 Subject: Problem lampoly SNF 2011-09-16 10:20:55: water chiller has failed Message-ID: From mdickey at snf.stanford.edu Fri Sep 16 10:35:05 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Fri, 16 Sep 2011 10:35:05 -0700 Subject: Problem lampoly SNF 2011-09-16 10:20:55: water chiller has failed Message-ID: chiller topped off From mdickey at snf.stanford.edu Mon Sep 19 07:27:32 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 19 Sep 2011 07:27:32 -0700 Subject: Shutdown lampoly SNF 2011-09-19 07:27:31: Chiller leak Message-ID: Chiller has a leak. Need to investigate From mdickey at snf.stanford.edu Mon Sep 19 11:40:31 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Mon, 19 Sep 2011 11:40:31 -0700 Subject: Shutdown lampoly SNF 2011-09-19 07:27:31: Chiller leak Message-ID: Fixed chiller leak From popomoo at snf.stanford.edu Tue Sep 20 08:56:26 2011 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Tue, 20 Sep 2011 08:56:26 -0700 Subject: Problem lampoly SNF 2011-09-20 08:56:25: water chiller has failed... Message-ID: From mdickey at snf.stanford.edu Tue Sep 20 09:08:07 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Tue, 20 Sep 2011 09:08:07 -0700 Subject: Problem lampoly SNF 2011-09-20 08:56:25: water chiller has failed... Message-ID: Topped off chiller From barlian at snf.stanford.edu Tue Sep 20 15:06:16 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Tue, 20 Sep 2011 15:06:16 -0700 Subject: Shutdown lampoly SNF 2011-09-20 15:06:15: exit arm failed Message-ID: This is the first time I see something like this: The exit arm unloaded my wafer and put it into the receiving casette. But instead of leaving it in the receiving casette, the arm took my wafer back into the chamber. Now the machine seems confused and giving error messages. All my four wafers are still inside the machine. One of them is still sitting on the alignment stage. From barlian at snf.stanford.edu Tue Sep 20 15:34:03 2011 From: barlian at snf.stanford.edu (barlian at snf.stanford.edu) Date: Tue, 20 Sep 2011 15:34:03 -0700 Subject: Problem lampoly SNF 2011-09-20 15:34:02: exit arm (pt. 2) Message-ID: I just talked to Mary and I told her that I've noticed that the exit arm has been having problems unloading wafers since yesterday. I always had to wiggle the receiving casette a little bit before it would let go the wafer into the receiving casette. From mtang at snf.stanford.edu Tue Sep 20 15:55:39 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 20 Sep 2011 15:55:39 -0700 Subject: Problem lampoly SNF 2011-09-20 15:55:39: Note to maintenance: Wafers in the system Message-ID: There is a wafer on the wafer centering station, one in the entrance loadlock and two in the chamber. The exit arm is extended into the chamber. If you can, please rescue and save the wafers for Alvin -- these are all device wafers. By the way, the problem sounds suspiciously like there may be an exit cassette alignment problem. From mtang at snf.stanford.edu Tue Sep 20 16:35:15 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 20 Sep 2011 16:35:15 -0700 Subject: Shutdown lampoly SNF 2011-09-20 15:06:15: exit arm failed Message-ID: Cesar rescued the wafers and will be checking the cassette and arm alignment. From mtang at snf.stanford.edu Tue Sep 20 16:36:47 2011 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Tue, 20 Sep 2011 16:36:47 -0700 Subject: Shutdown lampoly SNF 2011-09-20 16:36:47: Profile problem reported Message-ID: Two people reported profile problems. I'd like to take a look at the system in the morning so will leave it down for tonight. From cbaxter at snf.stanford.edu Tue Sep 20 17:51:38 2011 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Sep 2011 17:51:38 -0700 Subject: Shutdown lampoly SNF 2011-09-20 16:36:47: Profile problem reported Message-ID: Recovered all four wafer and also adjusted the receiver wafer sense present. From eenriquez at snf.stanford.edu Wed Sep 21 08:45:20 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Sep 2011 08:45:20 -0700 Subject: Problem lampoly SNF 2011-09-20 15:55:39: Note to maintenance: Wafers in the system Message-ID: Wafers have been recovered. From eenriquez at snf.stanford.edu Wed Sep 21 08:45:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Sep 2011 08:45:37 -0700 Subject: Problem lampoly SNF 2011-09-20 15:34:02: exit arm (pt. 2) Message-ID: Wafers have been recovered. From eenriquez at snf.stanford.edu Wed Sep 21 08:46:37 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 21 Sep 2011 08:46:37 -0700 Subject: Problem lampoly SNF 2011-09-21 08:46:36: Need to check wafer handling. Message-ID: Problems with the unload cassette need to check calibration. From mdickey at snf.stanford.edu Wed Sep 21 10:16:06 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 21 Sep 2011 10:16:06 -0700 Subject: Shutdown lampoly SNF 2011-09-21 10:16:06: leak Message-ID: Need to address another leak From mdickey at snf.stanford.edu Wed Sep 21 11:15:38 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Wed, 21 Sep 2011 11:15:38 -0700 Subject: Shutdown lampoly SNF 2011-09-21 10:16:06: leak Message-ID: leak fixed From sclaussen at snf.stanford.edu Wed Sep 21 17:44:02 2011 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Wed, 21 Sep 2011 17:44:02 -0700 Subject: Problem lampoly SNF 2011-09-21 17:44:01: Edges of wafer broke somewhere in etcher Message-ID: Most of the wafer stayed intact, but the edges near the minor flat broke off. Wafer was a carrier wafer for a piece, attached with polyimide tape and covered with resist. Resis burned on piece. From eenriquez at snf.stanford.edu Thu Sep 22 07:45:30 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2011 07:45:30 -0700 Subject: Problem lampoly SNF 2011-09-21 08:46:36: Need to check wafer handling. Message-ID: Cesar checked the handling. He concluded that the unload cassette is only having problems with wafers that have a a polished backside. From eenriquez at snf.stanford.edu Thu Sep 22 11:11:51 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 22 Sep 2011 11:11:51 -0700 Subject: Problem lampoly SNF 2011-09-21 17:44:01: Edges of wafer broke somewhere in etcher Message-ID: Found wafer pieces on the electrode. Cleaned the chamber and ran conditioning wafers. From cchen86 at snf.stanford.edu Thu Sep 29 09:55:51 2011 From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu) Date: Thu, 29 Sep 2011 09:55:51 -0700 Subject: Problem lampoly SNF 2011-09-29 09:55:51: Water chiller has failed Message-ID: From cchen86 at snf.stanford.edu Thu Sep 29 10:10:44 2011 From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu) Date: Thu, 29 Sep 2011 10:10:44 -0700 Subject: Shutdown lampoly SNF 2011-09-29 10:10:43: water chiller failed Message-ID: From mdickey at snf.stanford.edu Thu Sep 29 10:38:57 2011 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Thu, 29 Sep 2011 10:38:57 -0700 Subject: Shutdown lampoly SNF 2011-09-29 10:10:43: water chiller failed Message-ID: What you talking about Lewis? Chiller is fine!.....Topped off chiller From eenriquez at snf.stanford.edu Fri Sep 30 13:03:40 2011 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 30 Sep 2011 13:03:40 -0700 Subject: Problem lampoly SNF 2011-09-29 09:55:51: Water chiller has failed Message-ID: Added water to the chiller.