Problem lampoly SNF 2011-09-03 23:16:37: alarm 184 - the water chiller has failed

wslee at snf.stanford.edu wslee at snf.stanford.edu
Sat Sep 3 23:16:38 PDT 2011


The alarm 'the water chiller has failed' is up and cannot be cleared.  I ran a dummy wafer through and the temperature in the chamber seemed pretty close to the setpoint (within 2 degrees).  I am not sure if this is a more serious problem and the tool should be shutdown.




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