Shutdown lampoly SNF 2011-09-20 15:06:15: exit arm failed

barlian at snf.stanford.edu barlian at snf.stanford.edu
Tue Sep 20 15:06:16 PDT 2011


This is the first time I see something like this: The exit arm unloaded my wafer and put it into the receiving casette. But instead of leaving it in the receiving casette, the arm took my wafer back into the chamber. Now the machine seems confused and giving error messages. All my four wafers are still inside the machine. One of them is still sitting on the alignment stage.




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