Problem lampoly SNF 2011-09-20 15:34:02: exit arm (pt. 2)

barlian at snf.stanford.edu barlian at snf.stanford.edu
Tue Sep 20 15:34:03 PDT 2011


I just talked to Mary and I told her that I've noticed that the exit arm has been having problems unloading wafers since yesterday. I always had to wiggle the receiving casette a little bit before it would let go the wafer into the receiving casette.




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