Problem lampoly SNF 2011-09-20 15:55:39: Note to maintenance: Wafers in the system

mtang at snf.stanford.edu mtang at snf.stanford.edu
Tue Sep 20 15:55:39 PDT 2011


There is a wafer on the wafer centering station, one in the entrance loadlock and two in the chamber.  The exit arm is extended into the chamber.  If you can, please rescue and save the wafers for Alvin -- these are all device wafers.  By the way, the problem sounds suspiciously like there may be an exit cassette alignment problem. 




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