Problem lampoly SNF 2011-09-21 17:44:01: Edges of wafer broke somewhere in etcher

sclaussen at snf.stanford.edu sclaussen at snf.stanford.edu
Wed Sep 21 17:44:02 PDT 2011


Most of the wafer stayed intact, but the edges near the minor flat broke off. Wafer was a carrier wafer for a piece, attached with polyimide tape and covered with resist. Resis burned on piece.




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