From eenriquez at snf.stanford.edu Tue Apr 3 06:51:49 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Apr 2012 06:51:49 -0700 Subject: Comment lampoly SNF 2010-09-23 16:24:45: Tune/Load presets Message-ID: Archived From eenriquez at snf.stanford.edu Tue Apr 3 06:51:58 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Apr 2012 06:51:58 -0700 Subject: Comment lampoly SNF 2010-09-23 16:27:10: HBr shuts off slowly Message-ID: Archived From eenriquez at snf.stanford.edu Tue Apr 3 06:52:08 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Apr 2012 06:52:08 -0700 Subject: Comment lampoly SNF 2010-10-03 07:27:16: Update Message-ID: Archived From eenriquez at snf.stanford.edu Tue Apr 3 06:52:34 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Apr 2012 06:52:34 -0700 Subject: Comment lampoly SNF 2010-12-09 20:11:41: Update on the Problems with the Lam Etcher Message-ID: Archived From eenriquez at snf.stanford.edu Tue Apr 3 06:53:22 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Apr 2012 06:53:22 -0700 Subject: Comment lampoly SNF 2010-12-10 16:48:35: Configuration file changes Message-ID: Archived From eenriquez at snf.stanford.edu Tue Apr 3 06:53:30 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Apr 2012 06:53:30 -0700 Subject: Comment lampoly SNF 2010-12-10 18:28:31: Poly etch rate estimated at 3200A on my test wafer Message-ID: Archived From popomoo at snf.stanford.edu Thu Apr 5 11:37:31 2012 From: popomoo at snf.stanford.edu (popomoo at snf.stanford.edu) Date: Thu, 5 Apr 2012 11:37:31 -0700 Subject: Problem lampoly SNF 2012-04-05 11:37:30: 2 Entrance load failed... Message-ID: When the wafer was in the rotating chuck, it was stuck and the error msg '2 Entrance load failed...' showed up. It cannot be cleared, and the machine is stuck now. From eenriquez at snf.stanford.edu Thu Apr 5 13:55:14 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 5 Apr 2012 13:55:14 -0700 Subject: Problem lampoly SNF 2012-04-05 11:37:30: 2 Entrance load failed... Message-ID: rehomed the entry load lock robot and cycled wafers. From daesung at snf.stanford.edu Thu Apr 5 22:07:03 2012 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Thu, 5 Apr 2012 22:07:03 -0700 Subject: Problem lampoly SNF 2012-04-05 22:07:02: Low bias voltage (recipe 1) Message-ID: Reduced etch rate of polysilicon From eenriquez at snf.stanford.edu Fri Apr 6 09:34:48 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Apr 2012 09:34:48 -0700 Subject: Comment lampoly SNF 2012-04-06 09:34:48: Update low bias voltage Message-ID: Vented the chamber. It was very clean, no wafer pieces or heavy build-up. Wiped down the electrode. Ran 8 wafers with no problems. From daesung at snf.stanford.edu Fri Apr 6 14:49:51 2012 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Fri, 6 Apr 2012 14:49:51 -0700 Subject: Problem lampoly SNF 2012-04-06 14:49:51: Water chiller failure Message-ID: From cbaxter at snf.stanford.edu Fri Apr 6 16:06:54 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Apr 2012 16:06:54 -0700 Subject: Shutdown lampoly SNF 2012-04-06 16:06:53: Lower Auto Matching Network Message-ID: The lower auto matching network cooling fan is seized causing the auto match to overheat and high reflective power and lower dc bias. Removed auto match and cooling fan, will look for cooling fan replacement.. From cbaxter at snf.stanford.edu Fri Apr 6 17:05:52 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 6 Apr 2012 17:05:52 -0700 Subject: Comment lampoly SNF 2012-04-06 17:05:52: Cooling Fan Message-ID: Varian does not stock 115 vac fan will try Fry's electronic, if no luck tool will stay on shutdown till Monday.. From cbaxter at snf.stanford.edu Mon Apr 9 17:48:24 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Apr 2012 17:48:24 -0700 Subject: Comment lampoly SNF 2012-04-09 17:48:22: Update Message-ID: Jim Hayden is ordering a replacement cooling fan.. From cbaxter at snf.stanford.edu Mon Apr 9 18:43:07 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Apr 2012 18:43:07 -0700 Subject: Problem lampoly SNF 2012-04-06 14:49:51: Water chiller failure Message-ID: From cbaxter at snf.stanford.edu Tue Apr 10 17:04:32 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Apr 2012 17:04:32 -0700 Subject: Comment lampoly SNF 2012-04-10 17:04:31: Update Message-ID: The cooling fan is on order , eta is Friday... From cbaxter at snf.stanford.edu Wed Apr 11 16:57:29 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Apr 2012 16:57:29 -0700 Subject: Shutdown lampoly SNF 2012-04-06 16:06:53: Lower Auto Matching Network Message-ID: Installed new cooling fan. Ran dummy wafers and monitored dc bias voltage using recipe#1, the bias voltage at step#3 is -39 and step#5 is -49. From cbaxter at snf.stanford.edu Wed Apr 11 16:57:49 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Apr 2012 16:57:49 -0700 Subject: Problem lampoly SNF 2012-04-05 22:07:02: Low bias voltage (recipe 1) Message-ID: From cbaxter at snf.stanford.edu Wed Apr 11 16:57:59 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Apr 2012 16:57:59 -0700 Subject: Comment lampoly SNF 2012-04-10 17:04:31: Update Message-ID: From cbaxter at snf.stanford.edu Wed Apr 11 16:58:03 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Apr 2012 16:58:03 -0700 Subject: Comment lampoly SNF 2012-04-09 17:48:22: Update Message-ID: From cbaxter at snf.stanford.edu Wed Apr 11 16:58:07 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Apr 2012 16:58:07 -0700 Subject: Comment lampoly SNF 2012-04-06 17:05:52: Cooling Fan Message-ID: From cbaxter at snf.stanford.edu Wed Apr 11 16:58:12 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 11 Apr 2012 16:58:12 -0700 Subject: Comment lampoly SNF 2012-04-06 09:34:48: Update low bias voltage Message-ID: From eenriquez at snf.stanford.edu Thu Apr 12 07:08:08 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 12 Apr 2012 07:08:08 -0700 Subject: Comment lampoly SNF 2012-03-21 08:03:05: System check Message-ID: Archived From cchen86 at snf.stanford.edu Tue Apr 17 23:35:59 2012 From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu) Date: Tue, 17 Apr 2012 23:35:59 -0700 Subject: Shutdown lampoly SNF 2012-04-17 23:35:58: Failure during etching Message-ID: Alarm 81 occurred twice during etching: 81: Recipe aborted. RF hard tolerance exceeded during an RF on step. From eenriquez at snf.stanford.edu Thu Apr 19 07:01:22 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Apr 2012 07:01:22 -0700 Subject: Comment lampoly SNF 2012-04-19 07:01:22: Update Message-ID: No output from the bottom electrode's RF generator. We will replace it today. From eenriquez at snf.stanford.edu Thu Apr 19 14:57:01 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Apr 2012 14:57:01 -0700 Subject: Comment lampoly SNF 2012-04-19 14:57:00: Update Message-ID: RF generator needs to be sent out for repair. From wslee at snf.stanford.edu Mon Apr 23 10:34:27 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Mon, 23 Apr 2012 10:34:27 -0700 Subject: Comment lampoly SNF 2012-04-23 10:34:27: ETA for lampoly return to service? Message-ID: When will lampoly be back online?