Problem lampoly SNF 2012-04-05 11:37:30: 2 Entrance load failed...

popomoo at popomoo at
Thu Apr 5 11:37:31 PDT 2012

When the wafer was in the rotating chuck, it was stuck and the error msg '2 Entrance load failed...' showed up.
It cannot be cleared, and the machine is stuck now.

More information about the lampoly-pcs mailing list