Problem lampoly SNF 2012-04-05 11:37:30: 2 Entrance load failed...

popomoo at snf.stanford.edu popomoo at snf.stanford.edu
Thu Apr 5 11:37:31 PDT 2012


When the wafer was in the rotating chuck, it was stuck and the error msg '2 Entrance load failed...' showed up.
It cannot be cleared, and the machine is stuck now.




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