Comment lampoly SNF 2012-04-06 09:34:48: Update low bias voltage
eenriquez at snf.stanford.edu
eenriquez at snf.stanford.edu
Fri Apr 6 09:34:48 PDT 2012
Vented the chamber. It was very clean, no wafer pieces or heavy build-up. Wiped down the electrode. Ran 8 wafers with no problems.
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