Comment lampoly SNF 2012-04-06 09:34:48: Update low bias voltage

eenriquez at snf.stanford.edu eenriquez at snf.stanford.edu
Fri Apr 6 09:34:48 PDT 2012


Vented the chamber.  It was very clean, no wafer pieces or heavy build-up.  Wiped down the electrode.  Ran 8 wafers with no problems.




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