Shutdown lampoly SNF 2012-04-06 16:06:53: Lower Auto Matching Network

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Wed Apr 11 16:57:29 PDT 2012


Installed new cooling fan. Ran dummy wafers and monitored
dc bias voltage using recipe#1, the bias voltage at step#3 is
-39 and step#5 is -49.




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