April 2012 Archives by date

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Starting: Tue Apr 3 06:51:49 PDT 2012
Ending: Mon Apr 23 10:34:27 PDT 2012
Messages: 27

• Comment lampoly SNF 2010-09-23 16:24:45: Tune/Load presets   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-09-23 16:27:10: HBr shuts off slowly   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-10-03 07:27:16: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-12-09 20:11:41: Update on the Problems with the Lam Etcher   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-12-10 16:48:35: Configuration file changes   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2010-12-10 18:28:31: Poly etch rate estimated at 3200A on my test wafer   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-04-05 11:37:30: 2 Entrance load failed...   popomoo at snf.stanford.edu
• Problem lampoly SNF 2012-04-05 11:37:30: 2 Entrance load failed...   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-04-05 22:07:02: Low bias voltage (recipe 1)   daesung at snf.stanford.edu
• Comment lampoly SNF 2012-04-06 09:34:48: Update low bias voltage   eenriquez at snf.stanford.edu
• Problem lampoly SNF 2012-04-06 14:49:51: Water chiller failure   daesung at snf.stanford.edu
• Shutdown lampoly SNF 2012-04-06 16:06:53: Lower Auto Matching Network   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-04-06 17:05:52: Cooling Fan   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-04-09 17:48:22: Update   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2012-04-06 14:49:51: Water chiller failure   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-04-10 17:04:31: Update   cbaxter at snf.stanford.edu
• Shutdown lampoly SNF 2012-04-06 16:06:53: Lower Auto Matching Network   cbaxter at snf.stanford.edu
• Problem lampoly SNF 2012-04-05 22:07:02: Low bias voltage (recipe 1)   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-04-10 17:04:31: Update   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-04-09 17:48:22: Update   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-04-06 17:05:52: Cooling Fan   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-04-06 09:34:48: Update low bias voltage   cbaxter at snf.stanford.edu
• Comment lampoly SNF 2012-03-21 08:03:05: System check   eenriquez at snf.stanford.edu
• Shutdown lampoly SNF 2012-04-17 23:35:58: Failure during etching   cchen86 at snf.stanford.edu
• Comment lampoly SNF 2012-04-19 07:01:22: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-04-19 14:57:00: Update   eenriquez at snf.stanford.edu
• Comment lampoly SNF 2012-04-23 10:34:27: ETA for lampoly return to service?   wslee at snf.stanford.edu

Last message date: Mon Apr 23 10:34:27 PDT 2012
Archived on: Sun Dec 23 09:06:18 PST 2012

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