From cachang at snf.stanford.edu Fri Aug 3 13:26:31 2012 From: cachang at snf.stanford.edu (cachang at snf.stanford.edu) Date: Fri, 3 Aug 2012 13:26:31 -0700 Subject: Problem lampoly SNF 2012-08-03 13:26:30: Error 80 Message-ID: Ran dummy wafer for recipe 99. Got this alarm in step 3, 7sec 80 Recipe abort, pressure hard tolerance exceeded during an RF on step. Got the wafer out and re-ran recipe 99. It was ok for the second time.