Problem lampoly SNF 2012-08-03 13:26:30: Error 80

cachang at snf.stanford.edu cachang at snf.stanford.edu
Fri Aug 3 13:26:31 PDT 2012


Ran dummy wafer for recipe 99. Got this alarm in step 3, 7sec
80 Recipe abort, pressure hard tolerance exceeded during an RF on step.
Got the wafer out and re-ran recipe 99. It was ok for the second time.




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