From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 14, 2000 Subject: Comment lampoly: software timer/counter error. Message-ID: Rebooted tool to prevent software crash due to predicted timer/counter error. Machine rebooted cleanly. System OK. From kalavade at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: kalavade at snf.stanford.edu (kalavade at snf.stanford.edu) Date: Apr 25, 2000 Subject: Problem lampoly: "Hard pressure tolerance reached during RF ON step" Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 25, 2000 Subject: Problem Clear lampoly: re-teach throttle controller @pressure 10,15 m/t. Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 16, 2000 Subject: Shutdown lampoly: purging chamber over night with n2. chamber will need to be vented, in order to remove vat throttle valve assy. Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 17, 2000 Subject: Shutdown Clear lampoly: we not vent chamber at this time, lam eng. will try to cal. gas's again. Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 25, 2000 Subject: Shutdown lampoly: need to vent chamber and check throttle valve. Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 30, 2000 Subject: Shutdown Clear lampoly: chamber back together and tested.. Message-ID: From frankliu at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: frankliu at snf.stanford.edu (frankliu at snf.stanford.edu) Date: Jun 4, 2000 Subject: Problem lampoly: alarm 184 - water chiller has failed - cleared the alarm, but comes back with same problem - no processing done Message-ID: From frankliu at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: frankliu at snf.stanford.edu (frankliu at snf.stanford.edu) Date: Jun 4, 2000 Subject: Problem lampoly: not sure the last one went through - water chiller has failed Message-ID: Chiller failed From frankliu at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: frankliu at snf.stanford.edu (frankliu at snf.stanford.edu) Date: Jun 4, 2000 Subject: Problem lampoly: Still not registering yellow - one last time - water chiller has failed Message-ID: Third try From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jun 5, 2000 Subject: Shutdown lampoly: Shutdown - chiller fault Message-ID: Resistivity too low? From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 5, 2000 Subject: Shutdown Clear lampoly: changed both filter on chiller Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 5, 2000 Subject: Problem Clear lampoly: Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 5, 2000 Subject: Problem Clear lampoly: changed filter Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 5, 2000 Subject: Problem Clear lampoly: Message-ID: From kalavade at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: kalavade at snf.stanford.edu (kalavade at snf.stanford.edu) Date: Jun 23, 2000 Subject: Problem lampoly: operating system error in lam- Message-ID: I think the lam needs a power cycle, the software seems to have gone a little crazy- I hope someone fixes it this evening (friday)- From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jun 23, 2000 Subject: Problem Clear lampoly: rebooth system... Message-ID: From bchui at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Aug 11, 2000 Subject: Problem lampoly: internal timer will time out in 23 hours Message-ID: From bchui at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Aug 12, 2000 Subject: Problem lampoly: Internal timer overflowed Message-ID: At 3 pm saturday 8/12 the following alarm appeared: "341 ALERT: internal timer will overflow within one hour. Please restart systerm." At 4 pm, a bunch of other alarms appeared, presumably because the timer did overflow. From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 14, 2000 Subject: Problem Clear lampoly: rebooted lampoly. Message-ID: From mordovan at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mordovan at snf.stanford.edu (mordovan at snf.stanford.edu) Date: Aug 18, 2000 Subject: Shutdown lampoly: Wafer in chamber. Jim Message-ID: From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 22, 2000 Subject: Shutdown Clear lampoly: removed wafer & did DI wipe of chamber. Message-ID: From mordovan at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mordovan at snf.stanford.edu (mordovan at snf.stanford.edu) Date: Aug 23, 2000 Subject: Shutdown lampoly: transport failure Message-ID: From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 23, 2000 Subject: Shutdown Clear lampoly: removed wafer & cleared shutdown. Message-ID: From price at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: price at snf.stanford.edu (price at snf.stanford.edu) Date: Aug 29, 2000 Subject: Problem lampoly: Inner Ld Lk Door not closed Message-ID: From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 29, 2000 Subject: Problem Clear lampoly: cleared fault. Process restarted normally. Message-ID: From price at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: price at snf.stanford.edu (price at snf.stanford.edu) Date: Aug 29, 2000 Subject: Problem lampoly: LD LK inner Door not closed-waf in chbr. Message-ID: From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 30, 2000 Subject: Problem Clear lampoly: cleared door, processed wafer & put in box. Message-ID: From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 30, 2000 Subject: Shutdown lampoly: chiller is leaking. Message-ID: From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 30, 2000 Subject: Shutdown Clear lampoly: replaced leaking poly line. Message-ID: From aaronp at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: aaronp at snf.stanford.edu (aaronp at snf.stanford.edu) Date: Sep 8, 2000 Subject: Shutdown lampoly: load lock door down AGAIN Message-ID: From mcvittie at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sep 8, 2000 Subject: Shutdown Clear lampoly: Solenoid activated on removal of cover. Jim Message-ID: From price at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: price at snf.stanford.edu (price at snf.stanford.edu) Date: Sep 12, 2000 Subject: Shutdown lampoly: input ld lk door not closing Message-ID: From mcvittie at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sep 12, 2000 Subject: Shutdown Clear lampoly: Reset when sol. cover came off. Jim Message-ID: From jawad at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: jawad at snf.stanford.edu (jawad at snf.stanford.edu) Date: Sep 12, 2000 Subject: Shutdown lampoly: Message-ID: Alarm 297, Chamber pressure did not equalize to xover pressure. There are two LAMpoly dummy wafers stuck on the transport. From mcvittie at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mcvittie at snf.stanford.edu (mcvittie at snf.stanford.edu) Date: Sep 12, 2000 Subject: Shutdown Clear lampoly: Contact Nancy, Aaron or Jim for fix. Message-ID: From booth at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Sep 20, 2000 Subject: Problem lampoly: MFC#7 O2 intermittant zero drift noticed. Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 20, 2000 Subject: Shutdown lampoly: mfc#7 is removed for repair. Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 25, 2000 Subject: Shutdown Clear lampoly: installed o2 mfc and tested Message-ID: From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sep 25, 2000 Subject: Problem Clear lampoly: installed o2 mfc and tested Message-ID: From true at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: true at snf.stanford.edu (true at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly: gas 1 hard tolerance faultDate: Nov 16, 2000 7:47:30 PM Message-ID: My wafers are at various points throughout the machine. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly: gas 1 hard tolerance faultDate: Nov 16, 2000 10:46:21 PM Message-ID: adjusted zero on mfc 1 and manually removed wafer stuck inside process the process chamber.. From mtang at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-07-27 16:12:44: Run recipe 99 before running wafers Message-ID: <23235469.0.1344264710084.JavaMail.coral@shine> From mtang at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-07-27 21:56:27: Surface roughness? Message-ID: <28036507.1.1344264864534.JavaMail.coral@shine> Everything checks out fine. The user's recipe was lacking a breakthrough step. When put back in, the residue disappeared. Trenching was also observed, but some adjustment of the recipe for these particular structures should take care of this. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-08-03 13:26:30: Error 80 Message-ID: <32709337.2.1344266316488.JavaMail.coral@shine> From sclaussen at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: sclaussen at snf.stanford.edu (sclaussen at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-08-07 12:42:36: Error 80 during chamber etch. Message-ID: <8032287.53.1344368557022.JavaMail.coral@shine> Ran a chamber etch (Recipe 99) after warming up the chamber, and got an Error 80 during Step 3 (Pressure not reached, something about the RF). I aborted the Recipe, ran it again, and it worked fine. From mtang at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-08-07 12:42:36: Error 80 during chamber etch. Message-ID: <20630333.78.1344464343400.JavaMail.coral@shine> Presets for pressure and RF were way off. Adjusted as follows: Pressure: 1 sec. delay, 460/30 Upper RF: 500 msec delay, 27000/19000 Lower RF: default Ran a few wafers and control is good. From cchen86 at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cchen86 at snf.stanford.edu (cchen86 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-10 09:38:04: wafer left in the chamber? Message-ID: <27135901.125.1344616685212.JavaMail.coral@shine> When i did 3 wafers for cleaning, the last wafer did not come out of the chamber, and #54 alarm was triggered. From mdickey at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-10 09:38:04: wafer left in the chamber? Message-ID: <10557045.126.1344617600901.JavaMail.coral@shine> reinitialized arm out From scarreon at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: scarreon at snf.stanford.edu (scarreon at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-10 14:00:54: Alarm 376 - Gap Centering Message-ID: <16943424.133.1344632454889.JavaMail.coral@shine> First ran into an alarm that stated the arm was not able to extend/do requested action. Then ran into an alarm that stated the gap needed to finish centering. After waiting some time, was not able to clear it. Dummy wafers are still in the tool. From mtang at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-08-10 16:19:37: Wafers in LL and gap error Message-ID: <9760236.139.1344640778571.JavaMail.coral@shine> There are two wafers in the entrance loadlock, although the machine believes there is just one in the EXIT loadlock (which is empty). Not sure how this happened (two wafers in one slot on the load cassette?) I don't know if there is one still left inside the chamber. System error 376 will not clear - gap drive not centering during initialization. This error commonly appears during initialization but generally clears itself within a few seconds. It is not clearing now. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-10 14:00:54: Alarm 376 - Gap Centering Message-ID: <2114627.3.1344823268342.JavaMail.coral@shine> Gap will initialize due to blwn F3 5amp fuse. Changed fuse and recovered wafers. Ran recipe#1 w/out problem. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-13 13:47:17: Lost wafer in chamber Message-ID: <1107827.12.1344890838744.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-08-13 15:06:50: Update lost wafer Message-ID: <10986407.22.1344895610907.JavaMail.coral@shine> Found two wafers in the chamber. One was shattered and the other one was stuck to the clamp. Cleaned the chamber and the clamp. Now running the post wipe down cycle purge. Still need to cycle wafers after the purge. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-13 13:47:17: Lost wafer in chamber Message-ID: <15963722.36.1344966933655.JavaMail.coral@shine> Replaced dummy wafers. Ran chamber clean and condition. Cycled 8 wafers with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-08-13 15:06:50: Update lost wafer Message-ID: <3050044.37.1344966938704.JavaMail.coral@shine> Replaced dummy wafers. Ran chamber clean and condition. Cycled 8 wafers with no problems. From wslee at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-15 17:25:44: wafer stuck in chamber Message-ID: <1300966.62.1345076745470.JavaMail.coral@shine> Wafer 1 did not unload into the exit load lock. Wafer 2 loaded into the chamber and began etching. I aborted the recipe and then one of the wafers (I think the second one to enter) came out. I never saw the other one. From mdickey at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-15 17:25:44: wafer stuck in chamber Message-ID: <18878808.68.1345132677740.JavaMail.coral@shine> Cleaned up broken wafer in the chamber. Verified wafer hand off and ran wafers in recipe 1 with no problems From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-17 12:22:05: Loadlock pump problem Message-ID: <23079812.131.1345231326501.JavaMail.coral@shine> LL pump keeps shutting off. Need to replace. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-08-17 14:52:23: Update LL pump problem Message-ID: <29252693.141.1345240343457.JavaMail.coral@shine> Spare pump has a different power connector. The connector will be here on Monday. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-08-17 12:22:05: Loadlock pump problem Message-ID: <11496625.39.1345488765356.JavaMail.coral@shine> Replaced loadlock pump. Ran 4 conditioning wafers with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-08-17 14:52:23: Update LL pump problem Message-ID: <166846.40.1345488774455.JavaMail.coral@shine> Archived From raneeyoo at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: raneeyoo at snf.stanford.edu (raneeyoo at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-09-04 17:28:26: n o LTO dummnies for cleanning Message-ID: <20475417.29.1346804906506.JavaMail.coral@shine> From tasyurek at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-09-06 10:40:45: none of the buttons work Message-ID: <2017773.52.1346953245656.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-09-06 10:40:45: none of the buttons work Message-ID: <21952425.56.1346958075965.JavaMail.coral@shine> Rebooted the system. From wslee at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: wslee at snf.stanford.edu (wslee at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-09-06 17:47:00: turbo frequency slowing down Message-ID: <22444490.62.1346978820998.JavaMail.coral@shine> I checked to see what the turbo speed was for recipe 99. It got as low as 370Hz during the 300s clean. Since the last repair job, I have noticed that the turbo stays at 399-400Hz during the entire etch. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-09-06 17:47:00: turbo frequency slowing down Message-ID: <22391552.69.1347031520733.JavaMail.coral@shine> Ran two wafers with no problems. The turbo speed slowing down is normal for the long etches. The 400 Hz speed read by the user was the setpoint. From pnataraj at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-09-11 13:19:56: arm won't sense the wafer Message-ID: <32234525.81.1347394797333.JavaMail.coral@shine> From jaehlee at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: jaehlee at snf.stanford.edu (jaehlee at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-09-11 21:10:10: entrance load lock arm failed initialize reqeust Message-ID: <1029922.93.1347423011407.JavaMail.coral@shine> cannot even start the machine. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-09-11 21:10:10: entrance load lock arm failed initialize reqeust Message-ID: <17302257.101.1347465789170.JavaMail.coral@shine> reinitialized the entrace robot arm. Cycled 6 wafers with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-09-11 13:19:56: arm won't sense the wafer Message-ID: <17582889.102.1347465793179.JavaMail.coral@shine> reinitialized the entrace robot arm. Cycled 6 wafers with no problems. From bchui at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-02 17:02:33: ELL purge doesn't work (doesn't get to ATM) Message-ID: <12273467.18.1349222553911.JavaMail.coral@shine> All the wafers in the system are dummies. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-02 17:02:33: ELL purge doesn't work (doesn't get to ATM) Message-ID: <27674602.47.1349390738681.JavaMail.coral@shine> Adjusted the atm switch and increased the vent N2 purge. From lofaolain at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-05 12:47:52: Only 7 dummies available Message-ID: <5086911.18.1349466472551.JavaMail.coral@shine> From bchui at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-05 17:45:49: running SF6 recipe99 chamber clean... Message-ID: <29764264.40.1349484349408.JavaMail.coral@shine> for the user community. From pnataraj at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: pnataraj at snf.stanford.edu (pnataraj at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-06 11:05:36: turbo down Message-ID: <30523768.46.1349546737406.JavaMail.coral@shine> From mtang at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mtang at snf.stanford.edu (mtang at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-10-07 11:35:09: Request for wet clean Message-ID: <30809828.0.1349634910177.JavaMail.coral@shine> bchui showed "grass" in small trenches. I'd like to request a wet chamber clean be done and a standard monthly check (leak rate, flows, etc.) to make sure the system is in order. Thanks! (Mary) From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-07 20:37:49: Update Message-ID: <29983993.2.1349667469616.JavaMail.coral@shine> The main backing pump is bad, need to be change.. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-06 11:05:36: turbo down Message-ID: <11819046.21.1349721796059.JavaMail.coral@shine> Replaced the turbo backing pump. Ran 4 wafers with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-07 20:37:49: Update Message-ID: <26319903.22.1349721913071.JavaMail.coral@shine> Replaced the turbo backing pump. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-08 11:48:47: Wet clean update Message-ID: <19666870.23.1349722128094.JavaMail.coral@shine> Wet cleaned the chamber, performed monthly checks last week. Perhaps the grassing was caused by the degraded pump. From bchui at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-08 15:58:18: Re: request for wet clean Message-ID: <31601930.5.1349737098833.JavaMail.coral@shine> Hi Elmer, Cesar, Thanks for getting the machine back online so quickly! As for the wet clean, there are indications the grass is related to my wafers in particular; still investigating. So the chamber might be OK. Thanks, Ben From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-10-07 11:35:09: Request for wet clean Message-ID: <18326726.14.1349794346840.JavaMail.coral@shine> Completed wet clean From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-08 11:48:47: Wet clean update Message-ID: <9740942.15.1349794360979.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2011-04-30 06:31:38: Leak Up rate Message-ID: <19109760.16.1349794378157.JavaMail.coral@shine> Archived From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-06-19 17:58:06: Filled lower chiller .... Message-ID: <7475785.73.1349965776956.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-06-25 18:05:57: Turbo held up fine Message-ID: <31552409.74.1349965788083.JavaMail.coral@shine> archived From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2011-04-18 04:10:02: LAM often breaks first wafer Message-ID: <10494793.75.1349965801220.JavaMail.coral@shine> archived From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-21 07:53:26: Update Message-ID: <23185873.1.1350831206821.JavaMail.coral@shine> Completed weekly leak rate check.. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-08 15:58:18: Re: request for wet clean Message-ID: <8061489.139.1351281121976.JavaMail.coral@shine> Archived From dianmin at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: dianmin at snf.stanford.edu (dianmin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-10-27 15:41:18: Alarm 177 Message-ID: <32533436.158.1351377678401.JavaMail.coral@shine> Alarm 177 cannot be cleared: electrode temperature tolerance exceed, process can not be started From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-10-27 15:41:18: Alarm 177 Message-ID: <8245144.4.1351475443805.JavaMail.coral@shine> Reset heat exchanger.. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-28 19:06:21: Heat exchanger problem Message-ID: <15424732.5.1351476382096.JavaMail.coral@shine> The heat exchanger is tripped and it will start back up, will continue to troubleshoot.. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-28 19:06:21: Heat exchanger problem Message-ID: <17264786.6.1351478753787.JavaMail.coral@shine> Reset breaker behind the heat exhchanger, monitor for 1hrs to make it doe not trip. set electrodo temp at 60C. From dianmin at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: dianmin at snf.stanford.edu (dianmin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-30 20:13:22: Alarm 18 Message-ID: <9900644.88.1351653203251.JavaMail.coral@shine> Alarm 18: shuttle vaccum sense fail, sensor FALSE, should be TRUE. Alarm shown up during the process. There is one dummy wafer still in the chamber. From bchui at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-31 03:47:08: Suggestion re shuttle vacuum fail Message-ID: <25787087.94.1351680429612.JavaMail.coral@shine> The dummy wafers are probably over-etched and therefore too warped/pitted to support a vacuum. Suggest replace with new dummies From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-30 20:13:22: Alarm 18 Message-ID: <9647585.100.1351697752167.JavaMail.coral@shine> Wafers had been recovered from the system. Discarded the old, discolored dummy wafers and replaced them with new ones. Cycled 4 wafers with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-10-31 03:47:08: Suggestion re shuttle vacuum fail Message-ID: <6077090.101.1351697764174.JavaMail.coral@shine> thanks. From mzhang2 at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-10-31 10:56:54: wafer dropped in loading chamber Message-ID: <15114393.115.1351706214896.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-31 13:03:57: Dropped wafer in the chamber Message-ID: <19534115.119.1351713837592.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-10-31 10:56:54: wafer dropped in loading chamber Message-ID: <23512964.131.1351726284029.JavaMail.coral@shine> Recovered the wafers and cycled 6 wafers with no problems. From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-10-31 13:03:57: Dropped wafer in the chamber Message-ID: <26268501.132.1351726288037.JavaMail.coral@shine> Recovered the wafers and cycled 6 wafers with no problems. From mzhang2 at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mzhang2 at snf.stanford.edu (mzhang2 at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-11-01 14:37:58: error message Message-ID: <14764697.157.1351805879378.JavaMail.coral@shine> wafer not sensed at exit cassette. Probably wafer got stuck in the etching chamber From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-11-01 14:37:58: error message Message-ID: <11262677.165.1351823816250.JavaMail.coral@shine> Calibrate wafer placement from exit l/l to receiver elevator. Recovered wafer from main chamber. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-11-11 07:41:31: Chamber 's Leak Rate Message-ID: <19397123.2.1352648492489.JavaMail.coral@shine> _Chamber A: Base pressure @0.9mt and l/r @0.1mt -Chamber B: Base pressure @ 0.9mt and l/r @0.3mt -Chamber C: Base pressure @ 0.4mt and l/r @0.1mt From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-11-11 07:52:00: Chamber Leak Rate Message-ID: <29615099.3.1352649121620.JavaMail.coral@shine> -Main chamber: Base pressure@ 0.1mt and l/r at 0.6mt -Left load lock: Base pressure at 47mt and l/r at 7mt -Right load lock: Base pressure at 45mt and l/r at 4mt From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-11-11 07:41:31: Chamber 's Leak Rate Message-ID: <17306284.4.1352649204631.JavaMail.coral@shine> Wrong tool From mdickey at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-11-13 08:36:48: CF4 Message-ID: <24758223.7.1352824609557.JavaMail.coral@shine> Out of CF4. Replacement has been ordered From mdickey at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-11-13 10:00:13: CF4 Message-ID: <7228326.6.1352829613257.JavaMail.coral@shine> Freon 14 expected to be delivered thursday at the latest From dianmin at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: dianmin at snf.stanford.edu (dianmin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-11-15 10:44:03: Exit arm failed! My wafer inside Message-ID: <783920.80.1353005044119.JavaMail.coral@shine> Alarm 22 and alarm 96. Wafer stuck inside, needed for next process. Need help asap. Thanks! From dianmin at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: dianmin at snf.stanford.edu (dianmin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-11-15 10:48:59: Exit arm failed, sample stuck inside Message-ID: <32840678.81.1353005340033.JavaMail.coral@shine> Alarm 22 and alarm 96. My wafer stuck inside. Need help asap. Thanks! From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-11-15 10:48:59: Exit arm failed, sample stuck inside Message-ID: <2240803.87.1353025953986.JavaMail.coral@shine> Found two wafers inside the main chamber, one of the wafer broke into tiny pieces. Vacuum out broken wafer chips and wet clean chamber . Checked and verified wafer transfer, ran 5 wafers using recipe#1 w/out problem. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-11-15 10:44:03: Exit arm failed! My wafer inside Message-ID: <25674298.93.1353035850854.JavaMail.coral@shine> Recover wafer on main chamber. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Problem lampoly SNF 2012-11-13 08:36:48: CF4 Message-ID: <8053406.94.1353035871881.JavaMail.coral@shine> CF4 is back online.. From tasyurek at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-11-27 09:39:00: lampoly dummies in terrible shape Message-ID: <30283254.0.1354037941320.JavaMail.coral@shine> From dianmin at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: dianmin at snf.stanford.edu (dianmin at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-11-28 17:24:05: wafer stuck inside the chamber Message-ID: <25707951.3.1354152246258.JavaMail.coral@shine> Alarm Exit arm failed From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-11-28 17:24:05: wafer stuck inside the chamber Message-ID: <27471825.7.1354157759474.JavaMail.coral@shine> Recovered user's quartz wafer. The exit load lock cassette's wafer sensor could not detect the quartz wafer. The exit arm tried to pickup a second wafer from the chamber with the quartz wafer still on the blade. From xuanwu at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-12-15 16:01:42: wafers stuck inside multiple chambers Message-ID: <8808796.52.1355616103081.JavaMail.coral@shine> At first, I got error 54, "Wafer not sensed at exit cassette." I nudged the exit arm a bit, and it went back in, but didn't leave the wafer at the exit cassette; it went in with the wafer. Unfortunately, that wafer somehow got dropped by the arm. Then the loading chamber arm came out to pick out another wafer, but it already had a wafer on it. So two wafers ended up going into the loading chamber. Finally, the unloading arm came out without a wafer. I removed all my wafers from the sender cassette, but the rest of the wafers are all still in the machine. The machine's currently stuck because of another error 54. I'm going to leave it as is to keep all the wafers from going inside and possibly breaking. From xuanwu at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: xuanwu at snf.stanford.edu (xuanwu at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-12-15 16:07:59: re: wafers stuck in multiple chambers Message-ID: <22383060.53.1355616479485.JavaMail.coral@shine> More details: There should be 1 wafer stuck in the unload chamber, 1 wafer in the etch chamber, 2 wafers in the load chamber, and 1 wafer on the flat-finder arm. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-12-15 16:01:42: wafers stuck inside multiple chambers Message-ID: <1623128.2.1355670250078.JavaMail.coral@shine> Recovered wafers on both enterance and exit load lock. The wafer inside the main chamber broke into tiny wafer chips, vacuumed out wafer chips and wet clean chamber. Checked and verified wafer handoff from exit load lock to reciever elevator. From cbaxter at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-12-15 16:07:59: re: wafers stuck in multiple chambers Message-ID: <8901746.3.1355670278337.JavaMail.coral@shine> Recovered wafers.. From tasyurek at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: tasyurek at snf.stanford.edu (tasyurek at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Comment lampoly SNF 2012-12-16 10:07:20: sender cassette had 4 resist coated wafers in it, I put them on the table across lampoly on cleanroom wipes Message-ID: <14141119.7.1355681241149.JavaMail.coral@shine> From lofaolain at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: lofaolain at snf.stanford.edu (lofaolain at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-12-17 11:15:35: Loading arm frozen Message-ID: <10928329.27.1355771736413.JavaMail.coral@shine> From eenriquez at snf.stanford.edu Sun Dec 23 09:05:38 2012 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Sun, 23 Dec 2012 17:05:38 -0000 Subject: Shutdown lampoly SNF 2012-12-17 11:15:35: Loading arm frozen Message-ID: <12667489.33.1355776261507.JavaMail.coral@shine> Shuttle was unable to pickup the dummy wafer. Replaced the dummy and resume the dummy run.