Problem lampoly: LD LK inner Door not closed-waf in chbr.
price at snf.stanford.edu
price at snf.stanford.edu
Sun Dec 23 09:05:38 PST 2012
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Problem Clear lampoly: cleared fault. Process restarted normally.
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Problem Clear lampoly: cleared door, processed wafer & put in box.
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Previous message:
Problem Clear lampoly: cleared fault. Process restarted normally.
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Problem Clear lampoly: cleared door, processed wafer & put in box.
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